Investigations of the optical properties of Ba0.9Sr0.1TiO3 ferroelectric thin films by spectroscopic ellipsometry

Zhigao Hu; Genshui Wang; Zhiming Huang; Xiangjian Meng; Fuwen Shi; Junhao Chu

doi:10.1143/jjap.42.1400

Investigations of the optical properties of Ba_0.9Sr_0.1TiO₃ ferroelectric thin films by spectroscopic ellipsometry

Zhigao Hu, Genshui Wang, Zhiming Huang, Xiangjian Meng, Fuwen Shi, Junhao Chu

CAS - Shanghai Institute of Technical Physics

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

Ba_0.9Sr_0.1TiO₃ (BST) ferroelectric thin films with different film thickness were grown on Pt/Ti/SiO₂/Si (100) substrates by a modified sol-gel method. X-ray diffraction (XRD) patterns show that the crystallization of the BST films strongly depends on the film thickness. Spectroscopic ellipsometry (SE) was used to characterize the BST thin films in the photon energy range of 1.5-5.0 eV. By fitting the measured ellipsometric parameter (tan ψ and cos Δ ) data with a four-phase model (air/surface rough layer/BST/Pt), the optical properties of the BST thin films with different film thickness have been systematically investigated. Based on the analysis of dispersion in the refractive index, the refractive index dispersion parameters in the single-term Sellmeier relation were determined to be 5.15-7.13 × 10^-14 eVm². The fitted values of the optical band gap energy E₀ for the samples indicate the band-gap energy of the BST thin films shifts to lower energies with increasing film thickness.

Original language	English
Pages (from-to)	1400-1404
Number of pages	5
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	42
Issue number	3
DOIs	https://doi.org/10.1143/jjap.42.1400
State	Published - Mar 2003
Externally published	Yes

Keywords

BaSrTiO
Optical band gap energy
Optical properties, spectroscopic ellipsometry
Thickness dependence
Thin films

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10.1143/jjap.42.1400

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@article{bcd20109388d4e96b7075381d5659ed0,

title = "Investigations of the optical properties of Ba0.9Sr0.1TiO3 ferroelectric thin films by spectroscopic ellipsometry",

abstract = "Ba0.9Sr0.1TiO3 (BST) ferroelectric thin films with different film thickness were grown on Pt/Ti/SiO2/Si (100) substrates by a modified sol-gel method. X-ray diffraction (XRD) patterns show that the crystallization of the BST films strongly depends on the film thickness. Spectroscopic ellipsometry (SE) was used to characterize the BST thin films in the photon energy range of 1.5-5.0 eV. By fitting the measured ellipsometric parameter (tan ψ and cos Δ ) data with a four-phase model (air/surface rough layer/BST/Pt), the optical properties of the BST thin films with different film thickness have been systematically investigated. Based on the analysis of dispersion in the refractive index, the refractive index dispersion parameters in the single-term Sellmeier relation were determined to be 5.15-7.13 × 10-14 eVm2. The fitted values of the optical band gap energy E0 for the samples indicate the band-gap energy of the BST thin films shifts to lower energies with increasing film thickness.",

keywords = "BaSrTiO, Optical band gap energy, Optical properties, spectroscopic ellipsometry, Thickness dependence, Thin films",

author = "Zhigao Hu and Genshui Wang and Zhiming Huang and Xiangjian Meng and Fuwen Shi and Junhao Chu",

year = "2003",

month = mar,

doi = "10.1143/jjap.42.1400",

language = "英语",

volume = "42",

pages = "1400--1404",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "3",

}

Investigations of the optical properties of Ba_0.9Sr_0.1TiO₃ ferroelectric thin films by spectroscopic ellipsometry. / Hu, Zhigao; Wang, Genshui; Huang, Zhiming et al.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 42, No. 3, 03.2003, p. 1400-1404.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Investigations of the optical properties of Ba0.9Sr0.1TiO3 ferroelectric thin films by spectroscopic ellipsometry

AU - Hu, Zhigao

AU - Wang, Genshui

AU - Huang, Zhiming

AU - Meng, Xiangjian

AU - Shi, Fuwen

AU - Chu, Junhao

PY - 2003/3

Y1 - 2003/3

N2 - Ba0.9Sr0.1TiO3 (BST) ferroelectric thin films with different film thickness were grown on Pt/Ti/SiO2/Si (100) substrates by a modified sol-gel method. X-ray diffraction (XRD) patterns show that the crystallization of the BST films strongly depends on the film thickness. Spectroscopic ellipsometry (SE) was used to characterize the BST thin films in the photon energy range of 1.5-5.0 eV. By fitting the measured ellipsometric parameter (tan ψ and cos Δ ) data with a four-phase model (air/surface rough layer/BST/Pt), the optical properties of the BST thin films with different film thickness have been systematically investigated. Based on the analysis of dispersion in the refractive index, the refractive index dispersion parameters in the single-term Sellmeier relation were determined to be 5.15-7.13 × 10-14 eVm2. The fitted values of the optical band gap energy E0 for the samples indicate the band-gap energy of the BST thin films shifts to lower energies with increasing film thickness.

AB - Ba0.9Sr0.1TiO3 (BST) ferroelectric thin films with different film thickness were grown on Pt/Ti/SiO2/Si (100) substrates by a modified sol-gel method. X-ray diffraction (XRD) patterns show that the crystallization of the BST films strongly depends on the film thickness. Spectroscopic ellipsometry (SE) was used to characterize the BST thin films in the photon energy range of 1.5-5.0 eV. By fitting the measured ellipsometric parameter (tan ψ and cos Δ ) data with a four-phase model (air/surface rough layer/BST/Pt), the optical properties of the BST thin films with different film thickness have been systematically investigated. Based on the analysis of dispersion in the refractive index, the refractive index dispersion parameters in the single-term Sellmeier relation were determined to be 5.15-7.13 × 10-14 eVm2. The fitted values of the optical band gap energy E0 for the samples indicate the band-gap energy of the BST thin films shifts to lower energies with increasing film thickness.

KW - BaSrTiO

KW - Optical band gap energy

KW - Optical properties, spectroscopic ellipsometry

KW - Thickness dependence

KW - Thin films

UR - https://www.scopus.com/pages/publications/0037953120

U2 - 10.1143/jjap.42.1400

DO - 10.1143/jjap.42.1400

M3 - 文章

AN - SCOPUS:0037953120

SN - 0021-4922

VL - 42

SP - 1400

EP - 1404

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

IS - 3

ER -

Investigations of the optical properties of Ba_0.9Sr_0.1TiO₃ ferroelectric thin films by spectroscopic ellipsometry

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