Abstract
Ba(Zr x Ti 1-x )O 3 (BZT) (x = 0.20 and 0.30) thin films are deposited on Pt(1 1 1)/Ti/SiO 2 /Si(1 0 0) substrate by sol-gel method. X-ray diffraction patterns show that the thin films have a good crystallinity. Optical properties of the films in the wavelength range of 2.5-12 μm are studied by infrared spectroscopic ellipsometry (IRSE). The optical constants of the BZT thin films are determined by fitting the IRSE data using a classical dispersion formula. As the wavelength increases, the refractive index decreases, while the extinction coefficients increase. The effective static ionic charges are derived, which are smaller than that in a purely ionic material for the BZT thin films.
| Original language | English |
|---|---|
| Pages (from-to) | 5660-5663 |
| Number of pages | 4 |
| Journal | Applied Surface Science |
| Volume | 254 |
| Issue number | 18 |
| DOIs | |
| State | Published - 15 Jul 2008 |
| Externally published | Yes |
Keywords
- BZT
- Optical properties
- Sol-gel method