Infrared optical properties of Ba(Zr 0.20 Ti 0.80 )O 3 and Ba(Zr 0.30 Ti 0.70 )O 3 thin films prepared by sol-gel method

Aiyun Liu, Jianqiang Xue, Xiangjian Meng, Jinglan Sun, Zhiming Huang, Junhao Chu

Research output: Contribution to journalArticlepeer-review

28 Scopus citations

Abstract

Ba(Zr x Ti 1-x )O 3 (BZT) (x = 0.20 and 0.30) thin films are deposited on Pt(1 1 1)/Ti/SiO 2 /Si(1 0 0) substrate by sol-gel method. X-ray diffraction patterns show that the thin films have a good crystallinity. Optical properties of the films in the wavelength range of 2.5-12 μm are studied by infrared spectroscopic ellipsometry (IRSE). The optical constants of the BZT thin films are determined by fitting the IRSE data using a classical dispersion formula. As the wavelength increases, the refractive index decreases, while the extinction coefficients increase. The effective static ionic charges are derived, which are smaller than that in a purely ionic material for the BZT thin films.

Original languageEnglish
Pages (from-to)5660-5663
Number of pages4
JournalApplied Surface Science
Volume254
Issue number18
DOIs
StatePublished - 15 Jul 2008
Externally publishedYes

Keywords

  • BZT
  • Optical properties
  • Sol-gel method

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