Abstract
In this paper, the expressions for the effective segregation coefficient and composition depth profile of Hg1-xCdxTe liquid phase epitaxial (LPE) film are presented and compared with the experimental data. The expressions are derived based on the associated solution model and the phase diagram theory of Hg1-xCdxTe. The results show that supercooling, cooling rate, liquid composition, and nonequilibrium Hg pressure over the solution will result in the changes of average composition and composition-depth profile of the grown film. Adequate Hg loss, slow cooling rate, and proper prescription of liquid composition can improve the uniformity of longitudinal composition of Hg1-xCdxTe LPE film.
| Original language | English |
|---|---|
| Pages (from-to) | 975-981 |
| Number of pages | 7 |
| Journal | Journal of Electronic Materials |
| Volume | 24 |
| Issue number | 8 |
| DOIs | |
| State | Published - Aug 1995 |
| Externally published | Yes |
Keywords
- HgCdTe
- liquid phase epitaxy
- phase diagram