Influence of oxygen partial pressure on the optical properties of β-Ga2O3-δ films deposited by pulsed laser deposition

Liu Meng Li; Bin Zhou; Li Chen Gao; Kai Jiang; Liang Qing Zhu; Jin Zhong Zhang; Zhi Gao Hu; Jun Hao Chu

doi:10.11972/j.issn.1001-9014.2022.01.022

Influence of oxygen partial pressure on the optical properties of β-Ga₂O_3-δ films deposited by pulsed laser deposition

Liu Meng Li, Bin Zhou, Li Chen Gao, Kai Jiang, Liang Qing Zhu, Jin Zhong Zhang, Zhi Gao Hu, Jun Hao Chu

School of Physics and Electronic Science

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

High quality β-Ga₂O_3-δ films on c-sapphire substrates are deposited by pulsed laser deposition (PLD) under various oxygen partial pressures. The crystalline structure, chemometry and optical properties of the β-Ga₂O_3-δfilms are investigated systematically by X-ray diffraction (XRD), far-infrared reflectance spectra, X-ray photoelectron spectroscopy (XPS) and ultraviolet-visible-near infrared (UV-vis-NIR) transmittance spectra. The XRD analysis shows that all the as-deposited films are of unique (-201) orientation. The transmittance spectra reveal that the films exhibit a high transparency above 80% in the UV-vis-NIR wavelength region above 255 nm (4.863 eV). Moreover, the optical constants and optical direct bandgap are extracted based on the transmittance spectra with Tauc-Lorentz (TL) dispersion function model and Tauc's relationship, respectively. A further step, the influence of oxygen partial pressure on optical properties is explained by theoretical calculation.

Translated title of the contribution	氧分压对脉冲激光沉积β-Ga₂O_3-δ薄膜光学性能的影响
Original language	English
Pages (from-to)	279-284
Number of pages	6
Journal	Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves
Volume	41
Issue number	1
DOIs	https://doi.org/10.11972/j.issn.1001-9014.2022.01.022
State	Published - Feb 2022

Keywords

Optical properties
Oxygen partial pressure
Pulsed laser deposition
Β-GaO

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10.11972/j.issn.1001-9014.2022.01.022

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title = "Influence of oxygen partial pressure on the optical properties of β-Ga2O3-δ films deposited by pulsed laser deposition",

abstract = "High quality β-Ga2O3-δ films on c-sapphire substrates are deposited by pulsed laser deposition (PLD) under various oxygen partial pressures. The crystalline structure, chemometry and optical properties of the β-Ga2O3-δ films are investigated systematically by X-ray diffraction (XRD), far-infrared reflectance spectra, X-ray photoelectron spectroscopy (XPS) and ultraviolet-visible-near infrared (UV-vis-NIR) transmittance spectra. The XRD analysis shows that all the as-deposited films are of unique (-201) orientation. The transmittance spectra reveal that the films exhibit a high transparency above 80\% in the UV-vis-NIR wavelength region above 255 nm (4.863 eV). Moreover, the optical constants and optical direct bandgap are extracted based on the transmittance spectra with Tauc-Lorentz (TL) dispersion function model and Tauc's relationship, respectively. A further step, the influence of oxygen partial pressure on optical properties is explained by theoretical calculation.",

keywords = "Optical properties, Oxygen partial pressure, Pulsed laser deposition, Β-GaO",

author = "Li, \{Liu Meng\} and Bin Zhou and Gao, \{Li Chen\} and Kai Jiang and Zhu, \{Liang Qing\} and Zhang, \{Jin Zhong\} and Hu, \{Zhi Gao\} and Chu, \{Jun Hao\}",

year = "2022",

month = feb,

doi = "10.11972/j.issn.1001-9014.2022.01.022",

language = "英语",

volume = "41",

pages = "279--284",

journal = "Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves",

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T1 - Influence of oxygen partial pressure on the optical properties of β-Ga2O3-δ films deposited by pulsed laser deposition

AU - Li, Liu Meng

AU - Zhou, Bin

AU - Gao, Li Chen

AU - Jiang, Kai

AU - Zhu, Liang Qing

AU - Zhang, Jin Zhong

AU - Hu, Zhi Gao

AU - Chu, Jun Hao

PY - 2022/2

Y1 - 2022/2

N2 - High quality β-Ga2O3-δ films on c-sapphire substrates are deposited by pulsed laser deposition (PLD) under various oxygen partial pressures. The crystalline structure, chemometry and optical properties of the β-Ga2O3-δ films are investigated systematically by X-ray diffraction (XRD), far-infrared reflectance spectra, X-ray photoelectron spectroscopy (XPS) and ultraviolet-visible-near infrared (UV-vis-NIR) transmittance spectra. The XRD analysis shows that all the as-deposited films are of unique (-201) orientation. The transmittance spectra reveal that the films exhibit a high transparency above 80% in the UV-vis-NIR wavelength region above 255 nm (4.863 eV). Moreover, the optical constants and optical direct bandgap are extracted based on the transmittance spectra with Tauc-Lorentz (TL) dispersion function model and Tauc's relationship, respectively. A further step, the influence of oxygen partial pressure on optical properties is explained by theoretical calculation.

AB - High quality β-Ga2O3-δ films on c-sapphire substrates are deposited by pulsed laser deposition (PLD) under various oxygen partial pressures. The crystalline structure, chemometry and optical properties of the β-Ga2O3-δ films are investigated systematically by X-ray diffraction (XRD), far-infrared reflectance spectra, X-ray photoelectron spectroscopy (XPS) and ultraviolet-visible-near infrared (UV-vis-NIR) transmittance spectra. The XRD analysis shows that all the as-deposited films are of unique (-201) orientation. The transmittance spectra reveal that the films exhibit a high transparency above 80% in the UV-vis-NIR wavelength region above 255 nm (4.863 eV). Moreover, the optical constants and optical direct bandgap are extracted based on the transmittance spectra with Tauc-Lorentz (TL) dispersion function model and Tauc's relationship, respectively. A further step, the influence of oxygen partial pressure on optical properties is explained by theoretical calculation.

KW - Optical properties

KW - Oxygen partial pressure

KW - Pulsed laser deposition

KW - Β-GaO

UR - https://www.scopus.com/pages/publications/85126125160

U2 - 10.11972/j.issn.1001-9014.2022.01.022

DO - 10.11972/j.issn.1001-9014.2022.01.022

M3 - 文章

AN - SCOPUS:85126125160

SN - 1001-9014

VL - 41

SP - 279

EP - 284

JO - Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves

JF - Hongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves

IS - 1

ER -

Influence of oxygen partial pressure on the optical properties of β-Ga₂O_3-δ films deposited by pulsed laser deposition

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