Index compatible design of multi-layer film for MEMS-type variable optical attenuator

Deyan Peng; Guodong Li; Lianwei Wang; Zongsheng Lai

doi:10.1117/12.607904

Index compatible design of multi-layer film for MEMS-type variable optical attenuator

Deyan Peng, Guodong Li, Lianwei Wang, Zongsheng Lai

School of Physics and Electronic Science

East China Normal University

Research output: Contribution to journal › Conference article › peer-review

Abstract

The MEMS-type Fabry-Perot cavity is used widely in some kinds of tunable optical MEMS devices. In this paper, the index compatible problem of multi-layer optical film design of Fabry-Perot cavity in the variable optical attenuator (VOA) has been investigated, which is using the transport matrix of optical medium film theoretically. Based on our theoretical model and simulation, our design for the MEMS-type Fabry-Perot cavity has better advantage of the compatibility. At first, it can be adjusted for the different working mode. Secondly, the thickness of the multi-layer film can be restructured according the refractive index of the material available. Finally, it is a self-alignment system, which makes it quite favorable for fiber alignment and procedure of package.

Original language	English
Article number	141
Pages (from-to)	603-606
Number of pages	4
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5774
DOIs	https://doi.org/10.1117/12.607904
State	Published - 2005
Event	Fifth International Conference on Thin Film Physics and Applications - Shanghai, China Duration: 31 May 2004 → 2 Jun 2004

Keywords

Compatible design
Fabry-Perot cavity
MEMS
Multi-layer film

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10.1117/12.607904

Cite this

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title = "Index compatible design of multi-layer film for MEMS-type variable optical attenuator",

abstract = "The MEMS-type Fabry-Perot cavity is used widely in some kinds of tunable optical MEMS devices. In this paper, the index compatible problem of multi-layer optical film design of Fabry-Perot cavity in the variable optical attenuator (VOA) has been investigated, which is using the transport matrix of optical medium film theoretically. Based on our theoretical model and simulation, our design for the MEMS-type Fabry-Perot cavity has better advantage of the compatibility. At first, it can be adjusted for the different working mode. Secondly, the thickness of the multi-layer film can be restructured according the refractive index of the material available. Finally, it is a self-alignment system, which makes it quite favorable for fiber alignment and procedure of package.",

keywords = "Compatible design, Fabry-Perot cavity, MEMS, Multi-layer film",

author = "Deyan Peng and Guodong Li and Lianwei Wang and Zongsheng Lai",

year = "2005",

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volume = "5774",

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journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "Fifth International Conference on Thin Film Physics and Applications ; Conference date: 31-05-2004 Through 02-06-2004",

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TY - JOUR

T1 - Index compatible design of multi-layer film for MEMS-type variable optical attenuator

AU - Peng, Deyan

AU - Li, Guodong

AU - Wang, Lianwei

AU - Lai, Zongsheng

PY - 2005

Y1 - 2005

N2 - The MEMS-type Fabry-Perot cavity is used widely in some kinds of tunable optical MEMS devices. In this paper, the index compatible problem of multi-layer optical film design of Fabry-Perot cavity in the variable optical attenuator (VOA) has been investigated, which is using the transport matrix of optical medium film theoretically. Based on our theoretical model and simulation, our design for the MEMS-type Fabry-Perot cavity has better advantage of the compatibility. At first, it can be adjusted for the different working mode. Secondly, the thickness of the multi-layer film can be restructured according the refractive index of the material available. Finally, it is a self-alignment system, which makes it quite favorable for fiber alignment and procedure of package.

AB - The MEMS-type Fabry-Perot cavity is used widely in some kinds of tunable optical MEMS devices. In this paper, the index compatible problem of multi-layer optical film design of Fabry-Perot cavity in the variable optical attenuator (VOA) has been investigated, which is using the transport matrix of optical medium film theoretically. Based on our theoretical model and simulation, our design for the MEMS-type Fabry-Perot cavity has better advantage of the compatibility. At first, it can be adjusted for the different working mode. Secondly, the thickness of the multi-layer film can be restructured according the refractive index of the material available. Finally, it is a self-alignment system, which makes it quite favorable for fiber alignment and procedure of package.

KW - Compatible design

KW - Fabry-Perot cavity

KW - MEMS

KW - Multi-layer film

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DO - 10.1117/12.607904

M3 - 会议文章

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SN - 0277-786X

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SP - 603

EP - 606

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 141

T2 - Fifth International Conference on Thin Film Physics and Applications

Y2 - 31 May 2004 through 2 June 2004

ER -

Index compatible design of multi-layer film for MEMS-type variable optical attenuator

Abstract

Keywords

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