@inproceedings{03693f43620d43398dd525acd1b39c25,
title = "Improvement of GaN-based light-emitting diodes using surface-textured Indium-Tin-Oxide transparent ohmic contacts",
abstract = "To improve the extraction efficiency of GaN-based light-emitting diodes (LEDs), surface-textured Indium-Tin-Oxide (ITO) transparent ohmic contact layers have been fabricated by utilizing inductively coupled plasma etching technology and natural lithography with polystyrene spheres as the etching mask without destroying the P-GaN. The morphologies of the textured ITO surface were examined and characterized by a scanning electron microscope. The optimized and detailed parameters of the texturing process are reported. The fabricated LEDs with the surface-textured ITO ohmic contacts produce a luminance intensity that exceeds that of the traditional planar-surface LEDs by around 70\% at 20 mA dc current.",
keywords = "GaN-based light-emitting diodes (LEDs), Indium-tin-oxide(ITO), Natural lithography, Surface textured",
author = "Y. Yao and Jin, \{C. C.\} and Z. Dong and Z. Sun and Huang, \{S. M.\}",
year = "2007",
language = "英语",
isbn = "9787561752289",
series = "AD'07 - Proceedings of Asia Display 2007",
pages = "1570--1573",
booktitle = "AD'07 - Proceedings of Asia Display 2007",
note = "Asia Display 2007, AD'07 ; Conference date: 12-03-2007 Through 16-03-2007",
}