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Improved thermal stability and electrical properties for Al-Sb-Te based phase-change memory

  • Cheng Peng
  • , Liangcai Wu
  • , Feng Rao
  • , Zhitang Song
  • , Pingxiong Yang
  • , Limin Cheng
  • , Juntao Li
  • , Xilin Zhou
  • , Min Zhu
  • , Bo Liu
  • , Junhao Chu
  • CAS - Shanghai Institute of Microsystem and Information Technology
  • East China Normal University

Research output: Contribution to journalArticlepeer-review

Abstract

Phase-change alloys AlSbTe were investigated formaterial and electrical properties. A peak crystallization temperature of 236°C was found with 16.7 at.% Al doping Sb3Te (AST-16.7%), which showed a 10-year data retention temperature up to 131°C and a melting point as low as 542°C. The phase-change memory device based on AST-16.7% showed good reversible switching characteristics as operation time below 100 ns and low power consumption. Importantly, dramatically rapid SET operation with a shortest pulse width of 7 ns was achieved.

Original languageEnglish
Pages (from-to)P38-P41
JournalECS Solid State Letters
Volume1
Issue number2
DOIs
StatePublished - 2012

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