Impact of Process Fluctuations on Reconfigurable Silicon Nanowire Transistor

Xianglong Li, Xiaoqiao Yang, Zhe Zhang, Teng Wang, Yabin Sun, Ziyu Liu, Xiaojin Li, Yanling Shi, Jun Xu

Research output: Contribution to journalArticlepeer-review

21 Scopus citations

Abstract

In this article, the impact of intrinsic process fluctuations on reconfigurable field-effect transistor (RFET) is investigated for the first time. Three kinds of process fluctuation sources, including line edge roughness (LER), gate edge roughness (GER), and work-function variation (WFV), are performed in RFET using MATLAB and 3-D TCAD. The variation of ON-state current {I}-{ \mathrm{\scriptscriptstyle ON}} due to LER presents a weak correlation with that of OFF-state current {I}-{ \mathrm{\scriptscriptstyle OFF}}. Performance variation caused by GER is mainly attributed to the control GER. WFV in control gate and source dominates the variations of ON-state characteristics. The total overall performance fluctuations are primarily attributed to WFV. In the sight of {I}-{ \mathrm{\scriptscriptstyle ON}} , WFV contributed up to 84.7% and 82.8% of the total fluctuations for n-and p-Type, respectively.

Original languageEnglish
Article number9321221
Pages (from-to)885-891
Number of pages7
JournalIEEE Transactions on Electron Devices
Volume68
Issue number2
DOIs
StatePublished - Feb 2021

Keywords

  • Gate edge roughness (GER)
  • line edge roughness (LER)
  • process fluctuation
  • reconfigurable field-effect transistor (RFET)
  • silicon nanowire (SiNW)
  • work-function variation (WFV)

Fingerprint

Dive into the research topics of 'Impact of Process Fluctuations on Reconfigurable Silicon Nanowire Transistor'. Together they form a unique fingerprint.

Cite this