Impact of Nanosheet Pitch, Ambient Temperature, and Thermal Contact Resistance on Electrothermal Characteristics of Vertical Gate-All-Around Nanosheet FETs

Siqi Yang, Xiaojin Li, Yabin Sun, Yanling Shi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

In this paper, the impact of thermal boundary conditions on self-heating effect (SHE) of vertical gate-all-around nanosheet FETs (VGAAFETs) is investigated using the calibrated TCAD. The hydrodynamic model, density gradient quantization model, thin-layer mobility model and etc. are adopted to accurately capture the electrothermal behaviors. The results show that electrothermal characteristics strongly affected by ambient temperature. Besides, thermal coupling among nanosheets is enhanced as the pitch of nanosheets becomes smaller. As the via density decreases, the chief heat removal exit has changed from drain to substrate for the nonadiabatic drain-top VGAAFET. Moreover, the drain-top configuration endures less SHE degeneration but presents smaller driving current than the source-top one.

Original languageEnglish
Title of host publicationProceedings of 2022 IEEE 16th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2022
EditorsFan Ye, Ting-Ao Tang
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781665469067
DOIs
StatePublished - 2022
Event16th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2022 - Nanjing, China
Duration: 25 Oct 202228 Oct 2022

Publication series

NameProceedings of 2022 IEEE 16th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2022

Conference

Conference16th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2022
Country/TerritoryChina
CityNanjing
Period25/10/2228/10/22

Fingerprint

Dive into the research topics of 'Impact of Nanosheet Pitch, Ambient Temperature, and Thermal Contact Resistance on Electrothermal Characteristics of Vertical Gate-All-Around Nanosheet FETs'. Together they form a unique fingerprint.

Cite this