Humidity sensing behavior of silicon nanowires with hexamethyldisilazane modification

Xuejiao Chen; Jian Zhang; Zhiliang Wang; Qiang Yan; Shichao Hui

doi:10.1016/j.snb.2011.02.009

Humidity sensing behavior of silicon nanowires with hexamethyldisilazane modification

Xuejiao Chen, Jian Zhang, Zhiliang Wang, Qiang Yan, Shichao Hui

School of Communication and Electronic Engineering

East China Normal University

Research output: Contribution to journal › Article › peer-review

73 Scopus citations

Abstract

In this paper, the sensing behavior of the capacitive humidity sensors based on silicon nanowires with and without hexamethyldisilazane (HMDS) modification has been investigated. The sensing mechanism is based on the capacitance variations due to the adsorption/desorption of water molecules among silicon nanowires. The effect of HMDS modification on the sensor's performance was discussed. The study indicated that after HMDS treatment, the sensor's surface turns into hydrophobic and the sensor's performance such as the linearity, hysteresis and response time can be improved remarkably.

Original language	English
Pages (from-to)	631-636
Number of pages	6
Journal	Sensors and Actuators B: Chemical
Volume	156
Issue number	2
DOIs	https://doi.org/10.1016/j.snb.2011.02.009
State	Published - Aug 2011

Keywords

Hexamethyldisilazane
Humidity Sensing Behavior
Hydrophobic
Silicon Nanowires

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10.1016/j.snb.2011.02.009

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title = "Humidity sensing behavior of silicon nanowires with hexamethyldisilazane modification",

abstract = "In this paper, the sensing behavior of the capacitive humidity sensors based on silicon nanowires with and without hexamethyldisilazane (HMDS) modification has been investigated. The sensing mechanism is based on the capacitance variations due to the adsorption/desorption of water molecules among silicon nanowires. The effect of HMDS modification on the sensor's performance was discussed. The study indicated that after HMDS treatment, the sensor's surface turns into hydrophobic and the sensor's performance such as the linearity, hysteresis and response time can be improved remarkably.",

keywords = "Hexamethyldisilazane, Humidity Sensing Behavior, Hydrophobic, Silicon Nanowires",

author = "Xuejiao Chen and Jian Zhang and Zhiliang Wang and Qiang Yan and Shichao Hui",

year = "2011",

month = aug,

doi = "10.1016/j.snb.2011.02.009",

language = "英语",

volume = "156",

pages = "631--636",

journal = "Sensors and Actuators B: Chemical",

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T1 - Humidity sensing behavior of silicon nanowires with hexamethyldisilazane modification

AU - Chen, Xuejiao

AU - Zhang, Jian

AU - Wang, Zhiliang

AU - Yan, Qiang

AU - Hui, Shichao

PY - 2011/8

Y1 - 2011/8

N2 - In this paper, the sensing behavior of the capacitive humidity sensors based on silicon nanowires with and without hexamethyldisilazane (HMDS) modification has been investigated. The sensing mechanism is based on the capacitance variations due to the adsorption/desorption of water molecules among silicon nanowires. The effect of HMDS modification on the sensor's performance was discussed. The study indicated that after HMDS treatment, the sensor's surface turns into hydrophobic and the sensor's performance such as the linearity, hysteresis and response time can be improved remarkably.

AB - In this paper, the sensing behavior of the capacitive humidity sensors based on silicon nanowires with and without hexamethyldisilazane (HMDS) modification has been investigated. The sensing mechanism is based on the capacitance variations due to the adsorption/desorption of water molecules among silicon nanowires. The effect of HMDS modification on the sensor's performance was discussed. The study indicated that after HMDS treatment, the sensor's surface turns into hydrophobic and the sensor's performance such as the linearity, hysteresis and response time can be improved remarkably.

KW - Hexamethyldisilazane

KW - Humidity Sensing Behavior

KW - Hydrophobic

KW - Silicon Nanowires

UR - https://www.scopus.com/pages/publications/79958134742

U2 - 10.1016/j.snb.2011.02.009

DO - 10.1016/j.snb.2011.02.009

M3 - 文章

AN - SCOPUS:79958134742

SN - 0925-4005

VL - 156

SP - 631

EP - 636

JO - Sensors and Actuators B: Chemical

JF - Sensors and Actuators B: Chemical

IS - 2

ER -

Humidity sensing behavior of silicon nanowires with hexamethyldisilazane modification

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Keywords

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