Highly Sensitive Juntionless Nanowire Transistor Biosensor in Detecting Breast Tumor Marker

Zonglin Huang, Anran Gao, Shixing Chen, Yuelin Wang, Tie Li

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

Here, we demonstrate a real-time, ultrasensitive junctionless nanowire transistor (JNT) biosensor for breast tumor marker sensing. The proposed JNT biosensor with low-frequency noise, small subthreshold slope and high channel mobility has great potential to solve the key problem of poor signal-to-noise ratio or low sensitivity in current nanobiosensor. The JNT with CMOS-compatibility is made using a (111) silicon-on-insulator (SOi) wafer with a low-cost and top-down fabrication approach. The fabricated device shows excellent electrical properties and high sensitivity for recognizing breast tumor marker (the CEA protein) as low as 1fg/ml.

Original languageEnglish
Title of host publication2018 IEEE SENSORS, SENSORS 2018 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538647073
DOIs
StatePublished - 26 Dec 2018
Externally publishedYes
Event17th IEEE SENSORS Conference, SENSORS 2018 - New Delhi, India
Duration: 28 Oct 201831 Oct 2018

Publication series

NameProceedings of IEEE Sensors
Volume2018-October
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Conference

Conference17th IEEE SENSORS Conference, SENSORS 2018
Country/TerritoryIndia
CityNew Delhi
Period28/10/1831/10/18

Keywords

  • anti-carcino embryonic antigen (CEA)
  • highly sensitive sensor
  • junctionless transistor
  • silicon nanowire

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