High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions

Yuanxin Tan; Zhaohui Wang; Wei Chu; Yang Liao; Lingling Qiao; Ya Cheng

doi:10.1364/OME.6.003787

High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions

Yuanxin Tan
, Zhaohui Wang
, Wei Chu
, Yang Liao
, Lingling Qiao
, Ya Cheng^*

^*Corresponding author for this work

School of Physics and Electronic Science

CAS - Shanghai Institute of Optics and Fine Mechanics
ShanghaiTech University
AVIC

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

Abstract

We report on the fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of ~100 μm.

Original language	English
Pages (from-to)	3787-3793
Number of pages	7
Journal	Optical Materials Express
Volume	6
Issue number	12
DOIs	https://doi.org/10.1364/OME.6.003787
State	Published - 2016

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Cite this

@article{6cf90376de8d4df1897a23cbf4265057,

title = "High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions",

abstract = "We report on the fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of \textasciitilde{}100 μm.",

author = "Yuanxin Tan and Zhaohui Wang and Wei Chu and Yang Liao and Lingling Qiao and Ya Cheng",

note = "Publisher Copyright: {\textcopyright} 2016 Optical Society of America.",

year = "2016",

doi = "10.1364/OME.6.003787",

language = "英语",

volume = "6",

pages = "3787--3793",

journal = "Optical Materials Express",

issn = "2159-3930",

publisher = "Optica Publishing Group (formerly OSA)",

number = "12",

}

TY - JOUR

T1 - High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions

AU - Tan, Yuanxin

AU - Wang, Zhaohui

AU - Chu, Wei

AU - Liao, Yang

AU - Qiao, Lingling

AU - Cheng, Ya

PY - 2016

Y1 - 2016

N2 - We report on the fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of ~100 μm.

AB - We report on the fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of ~100 μm.

UR - https://www.scopus.com/pages/publications/85007165285

U2 - 10.1364/OME.6.003787

DO - 10.1364/OME.6.003787

M3 - 文章

AN - SCOPUS:85007165285

SN - 2159-3930

VL - 6

SP - 3787

EP - 3793

JO - Optical Materials Express

JF - Optical Materials Express

IS - 12

ER -

High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions

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