@inproceedings{8d0015f859ba46d0a8ff884bb945f3bb,
title = "High-resolution femtosecond laser 3D micromachining using low-NA focusing systems",
abstract = "Low-NA focusing systems can offer longer working distances than the high-NA ones, thereby enabling fabrication of 3D structures of great heights/thicknesses. However, degradation of the longitudinal resolution occurs at low NAs as a consequence of diffraction of the light waves. Here, we report on high-resolution laser printing of three dimensional (3D) structures of heights up to a few centimeters with a sub-10 μm longitudinal resolution by incorporating a simultaneous spatiotemporal focusing (SSTF) scheme into the femtosecond laser direct writing. Remarkably, the SSTF can ensure generation of symmetric focal spots (i.e., spherical focal spots) of comparable sizes along both the horizontal and vertical directions. The resolutions are tunable in real time by dynamically varying the power of the writing laser beam. The ability to simultaneous achieving the large heights and high longitudinal resolutions in femtosecond laser 3D micromachining is of great use for applications ranging from microfluidics to infrared and THz photonics.",
keywords = "3D micromachining, Femtosecond laser microfabrication, simultaneous spatiotemporal focusing",
author = "Wei Chu and Peng Wang and Lingling Qiao and Wenbo Li and Yuanxin Tan and Ya Cheng",
note = "Publisher Copyright: Copyright {\textcopyright} 2019 SPIE.; Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIX 2019 ; Conference date: 02-02-2019 Through 05-02-2019",
year = "2019",
doi = "10.1117/12.2516203",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Michel Meunier and Roberto Osellame and Herman, \{Peter R.\}",
booktitle = "Frontiers in Ultrafast Optics",
address = "美国",
}