High-quality-factor optical microresonators fabricated on lithium niobate thin film with an electro-optical tuning range spanning over one free spectral range

Zhe Wang; Chaohua Wu; Zhiwei Fang; Min Wang; Jintian Lin; Rongbo Wu; Jianhao Zhang; Jianping Yu; Miao Wu; Wei Chu; Tao Lu; Gang Chen; Ya Cheng

doi:10.3788/COL202119.060002

High-quality-factor optical microresonators fabricated on lithium niobate thin film with an electro-optical tuning range spanning over one free spectral range

Zhe Wang
, Chaohua Wu
, Zhiwei Fang^*
, Min Wang
, Jintian Lin
, Rongbo Wu
, Jianhao Zhang
, Jianping Yu
, Miao Wu
, Wei Chu
, Tao Lu
, Gang Chen^*
, Ya Cheng^*

^*Corresponding author for this work

School of Physics and Electronic Science

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

We demonstrate high-quality (intrinsic Q factor ∼2.8 x 106) racetrack microresonators fabricated on lithium niobate thin film with a free spectral range (FSR) of ∼86 pm. By integrating microelectrodes alongside the two straight arms of the racetrack resonator, the resonance wavelength around 1550 nm can be red shifted by 92 pm when the electric voltage is raised from -100 V to 100 V. The microresonators with the tuning range spanning over a full FSR are fabricated using photolithography assisted chemo-mechanical etching.

Original language	English
Article number	060002
Journal	Chinese Optics Letters
Volume	9
Issue number	6
DOIs	https://doi.org/10.3788/COL202119.060002
State	Published - 10 Jun 2021

Keywords

Chemo-mechanical etching
Electro-optical tuning
Lithium niobate
Microresonators

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10.3788/COL202119.060002

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Wang, Z., Wu, C., Fang, Z., Wang, M., Lin, J., Wu, R., Zhang, J., Yu, J., Wu, M., Chu, W., Lu, T., Chen, G., & Cheng, Y. (2021). High-quality-factor optical microresonators fabricated on lithium niobate thin film with an electro-optical tuning range spanning over one free spectral range. Chinese Optics Letters, 9(6), Article 060002. https://doi.org/10.3788/COL202119.060002

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title = "High-quality-factor optical microresonators fabricated on lithium niobate thin film with an electro-optical tuning range spanning over one free spectral range",

abstract = "We demonstrate high-quality (intrinsic Q factor ∼2.8 x 106) racetrack microresonators fabricated on lithium niobate thin film with a free spectral range (FSR) of ∼86 pm. By integrating microelectrodes alongside the two straight arms of the racetrack resonator, the resonance wavelength around 1550 nm can be red shifted by 92 pm when the electric voltage is raised from -100 V to 100 V. The microresonators with the tuning range spanning over a full FSR are fabricated using photolithography assisted chemo-mechanical etching.",

keywords = "Chemo-mechanical etching, Electro-optical tuning, Lithium niobate, Microresonators",

author = "Zhe Wang and Chaohua Wu and Zhiwei Fang and Min Wang and Jintian Lin and Rongbo Wu and Jianhao Zhang and Jianping Yu and Miao Wu and Wei Chu and Tao Lu and Gang Chen and Ya Cheng",

year = "2021",

month = jun,

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doi = "10.3788/COL202119.060002",

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T1 - High-quality-factor optical microresonators fabricated on lithium niobate thin film with an electro-optical tuning range spanning over one free spectral range

AU - Wang, Zhe

AU - Wu, Chaohua

AU - Fang, Zhiwei

AU - Wang, Min

AU - Lin, Jintian

AU - Wu, Rongbo

AU - Zhang, Jianhao

AU - Yu, Jianping

AU - Wu, Miao

AU - Chu, Wei

AU - Lu, Tao

AU - Chen, Gang

AU - Cheng, Ya

PY - 2021/6/10

Y1 - 2021/6/10

N2 - We demonstrate high-quality (intrinsic Q factor ∼2.8 x 106) racetrack microresonators fabricated on lithium niobate thin film with a free spectral range (FSR) of ∼86 pm. By integrating microelectrodes alongside the two straight arms of the racetrack resonator, the resonance wavelength around 1550 nm can be red shifted by 92 pm when the electric voltage is raised from -100 V to 100 V. The microresonators with the tuning range spanning over a full FSR are fabricated using photolithography assisted chemo-mechanical etching.

AB - We demonstrate high-quality (intrinsic Q factor ∼2.8 x 106) racetrack microresonators fabricated on lithium niobate thin film with a free spectral range (FSR) of ∼86 pm. By integrating microelectrodes alongside the two straight arms of the racetrack resonator, the resonance wavelength around 1550 nm can be red shifted by 92 pm when the electric voltage is raised from -100 V to 100 V. The microresonators with the tuning range spanning over a full FSR are fabricated using photolithography assisted chemo-mechanical etching.

KW - Chemo-mechanical etching

KW - Electro-optical tuning

KW - Lithium niobate

KW - Microresonators

UR - https://www.scopus.com/pages/publications/85105326203

U2 - 10.3788/COL202119.060002

DO - 10.3788/COL202119.060002

M3 - 文章

AN - SCOPUS:85105326203

SN - 1671-7694

VL - 9

JO - Chinese Optics Letters

JF - Chinese Optics Letters

IS - 6

M1 - 060002

ER -

High-quality-factor optical microresonators fabricated on lithium niobate thin film with an electro-optical tuning range spanning over one free spectral range

Abstract

Keywords

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