High-precision propagation-loss measurement of single-mode opticalwaveguides on lithium niobate on insulator

Jintian Lin; Junxia Zhou; Rongbo Wu; Min Wang; Zhiwei Fang; Wei Chu; Jianhao Zhang; Lingling Qiao; Ya Cheng

doi:10.3390/mi10090612

High-precision propagation-loss measurement of single-mode opticalwaveguides on lithium niobate on insulator

Jintian Lin, Junxia Zhou, Rongbo Wu, Min Wang, Zhiwei Fang, Wei Chu, Jianhao Zhang, Lingling Qiao, Ya Cheng

School of Physics and Electronic Science

Research output: Contribution to journal › Article › peer-review

30 Scopus citations

Abstract

We demonstrate the fabrication of single-mode optical waveguides on lithium niobate on an insulator (LNOI) by optical patterning combined with chemomechanical polishing. The fabricated LNOI waveguides had a nearly symmetric mode profile of ~2.5 μ m mode field size (full-width at half-maximum). We developed a high-precision measurement approach by which single-mode waveguides were characterized to have propagation loss of ~0.042 dB/cm.

Original language	English
Article number	612
Journal	Micromachines
Volume	10
Issue number	9
DOIs	https://doi.org/10.3390/mi10090612
State	Published - 1 Sep 2019

Keywords

Chemomechanical polish
Lithium niobate
Optical lithography
Photonic integrated circuit
Waveguide

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10.3390/mi10090612

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title = "High-precision propagation-loss measurement of single-mode opticalwaveguides on lithium niobate on insulator",

abstract = "We demonstrate the fabrication of single-mode optical waveguides on lithium niobate on an insulator (LNOI) by optical patterning combined with chemomechanical polishing. The fabricated LNOI waveguides had a nearly symmetric mode profile of \textasciitilde{}2.5 μ m mode field size (full-width at half-maximum). We developed a high-precision measurement approach by which single-mode waveguides were characterized to have propagation loss of \textasciitilde{}0.042 dB/cm.",

keywords = "Chemomechanical polish, Lithium niobate, Optical lithography, Photonic integrated circuit, Waveguide",

author = "Jintian Lin and Junxia Zhou and Rongbo Wu and Min Wang and Zhiwei Fang and Wei Chu and Jianhao Zhang and Lingling Qiao and Ya Cheng",

note = "Publisher Copyright: {\textcopyright} 2019 by the authors.",

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T1 - High-precision propagation-loss measurement of single-mode opticalwaveguides on lithium niobate on insulator

AU - Lin, Jintian

AU - Zhou, Junxia

AU - Wu, Rongbo

AU - Wang, Min

AU - Fang, Zhiwei

AU - Chu, Wei

AU - Zhang, Jianhao

AU - Qiao, Lingling

AU - Cheng, Ya

PY - 2019/9/1

Y1 - 2019/9/1

N2 - We demonstrate the fabrication of single-mode optical waveguides on lithium niobate on an insulator (LNOI) by optical patterning combined with chemomechanical polishing. The fabricated LNOI waveguides had a nearly symmetric mode profile of ~2.5 μ m mode field size (full-width at half-maximum). We developed a high-precision measurement approach by which single-mode waveguides were characterized to have propagation loss of ~0.042 dB/cm.

AB - We demonstrate the fabrication of single-mode optical waveguides on lithium niobate on an insulator (LNOI) by optical patterning combined with chemomechanical polishing. The fabricated LNOI waveguides had a nearly symmetric mode profile of ~2.5 μ m mode field size (full-width at half-maximum). We developed a high-precision measurement approach by which single-mode waveguides were characterized to have propagation loss of ~0.042 dB/cm.

KW - Chemomechanical polish

KW - Lithium niobate

KW - Optical lithography

KW - Photonic integrated circuit

KW - Waveguide

UR - https://www.scopus.com/pages/publications/85072555553

U2 - 10.3390/mi10090612

DO - 10.3390/mi10090612

M3 - 文章

AN - SCOPUS:85072555553

SN - 2072-666X

VL - 10

JO - Micromachines

JF - Micromachines

IS - 9

M1 - 612

ER -

High-precision propagation-loss measurement of single-mode opticalwaveguides on lithium niobate on insulator

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Keywords

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