High performance materials processing using tailored femtosecond laser pulses

Koji Sugioka; Katsumi Midorikawa; Fei He; Ya Cheng

doi:10.1109/CLEOPR.2015.7375984

High performance materials processing using tailored femtosecond laser pulses

Koji Sugioka, Katsumi Midorikawa, Fei He, Ya Cheng

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Tailored femtosecond laser pulses can enhance the performance for materials processing. Temporarily tailored femtosecond laser pulses are employed for high efficiency glass welding, while the spatially one, for formation of taper-free through Si vias.

Original language	English
Title of host publication	2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781467371094
DOIs	https://doi.org/10.1109/CLEOPR.2015.7375984
State	Published - 7 Jan 2016
Externally published	Yes
Event	11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015 - Busan, Korea, Republic of Duration: 24 Aug 2015 → 28 Aug 2015

Publication series

Name	2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015
Volume	2

Conference

Conference	11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015
Country/Territory	Korea, Republic of
City	Busan
Period	24/08/15 → 28/08/15

Access to Document

10.1109/CLEOPR.2015.7375984

Cite this

Sugioka, K., Midorikawa, K., He, F., & Cheng, Y. (2016). High performance materials processing using tailored femtosecond laser pulses. In 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015 Article 7375984 (2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2015.7375984

@inproceedings{11018d69367b47eca58a47e305ca74eb,

title = "High performance materials processing using tailored femtosecond laser pulses",

abstract = "Tailored femtosecond laser pulses can enhance the performance for materials processing. Temporarily tailored femtosecond laser pulses are employed for high efficiency glass welding, while the spatially one, for formation of taper-free through Si vias.",

author = "Koji Sugioka and Katsumi Midorikawa and Fei He and Ya Cheng",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015 ; Conference date: 24-08-2015 Through 28-08-2015",

year = "2016",

month = jan,

day = "7",

doi = "10.1109/CLEOPR.2015.7375984",

language = "英语",

series = "2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015",

address = "美国",

}

Sugioka, K, Midorikawa, K, He, F & Cheng, Y 2016, High performance materials processing using tailored femtosecond laser pulses. in 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015., 7375984, 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015, vol. 2, Institute of Electrical and Electronics Engineers Inc., 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015, Busan, Korea, Republic of, 24/08/15. https://doi.org/10.1109/CLEOPR.2015.7375984

High performance materials processing using tailored femtosecond laser pulses. / Sugioka, Koji; Midorikawa, Katsumi; He, Fei et al.
2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015. Institute of Electrical and Electronics Engineers Inc., 2016. 7375984 (2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - High performance materials processing using tailored femtosecond laser pulses

AU - Sugioka, Koji

AU - Midorikawa, Katsumi

AU - He, Fei

AU - Cheng, Ya

PY - 2016/1/7

Y1 - 2016/1/7

N2 - Tailored femtosecond laser pulses can enhance the performance for materials processing. Temporarily tailored femtosecond laser pulses are employed for high efficiency glass welding, while the spatially one, for formation of taper-free through Si vias.

AB - Tailored femtosecond laser pulses can enhance the performance for materials processing. Temporarily tailored femtosecond laser pulses are employed for high efficiency glass welding, while the spatially one, for formation of taper-free through Si vias.

UR - https://www.scopus.com/pages/publications/84964030247

U2 - 10.1109/CLEOPR.2015.7375984

DO - 10.1109/CLEOPR.2015.7375984

M3 - 会议稿件

AN - SCOPUS:84964030247

T3 - 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015

BT - 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015

Y2 - 24 August 2015 through 28 August 2015

ER -

Sugioka K, Midorikawa K, He F, Cheng Y. High performance materials processing using tailored femtosecond laser pulses. In 2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015. Institute of Electrical and Electronics Engineers Inc. 2016. 7375984. (2015 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015). doi: 10.1109/CLEOPR.2015.7375984

High performance materials processing using tailored femtosecond laser pulses

Abstract

Publication series

Conference

Access to Document

Other files and links

Fingerprint

Cite this