High-performance laser processing using manipulated ultrafast laser pulses

Koji Sugioka*, Ya Cheng, Zhizhan Xu, Yasutaka Hanada, Katsumi Midorikawa

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We employ manipulated ultrafast laser pulses to realize microprocessing with high-performance. Efficient microwelding of glass substrates by irradiation by a double-pulse train of ultrafast laser pulses is demonstrated. The bonding strength of two photostructurable glass substrates welded by double-pulse irradiation was evaluated to be 22.9 MPa, which is approximately 22% greater than that of a sample prepared by conventional irradiation by a single pulse train. Additionally, the fabrication of hollow microfluidic channels with a circular cross-sectional shape embedded in fused silica is realized by spatiotemporally focusing the ultrafast laser beam. We show both theoretically and experimentally that the spatiotemporal focusing of ultrafast laser beam allows for the creation of a three-dimensionally symmetric spherical peak intensity distribution at the focal spot.

Original languageEnglish
Title of host publicationInternational Symposium on High Power Laser Ablation 2012
Pages57-67
Number of pages11
DOIs
StatePublished - 2012
Externally publishedYes
Event9th International Symposium on High Power Laser Ablation 2012, HPLA 2012 - Santa Fe, NM, United States
Duration: 30 Apr 20123 May 2012

Publication series

NameAIP Conference Proceedings
Volume1464
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Conference

Conference9th International Symposium on High Power Laser Ablation 2012, HPLA 2012
Country/TerritoryUnited States
CitySanta Fe, NM
Period30/04/123/05/12

Keywords

  • Beam shaping
  • Double-pulse irradiation
  • Glass welding
  • Manipulated pulse
  • Microfludic channel
  • Spatiotemporal shaping
  • Ultrafast laser

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