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High-Performance Air-Stable Polymer Monolayer Transistors for Monolithic 3D CMOS logics

  • Miao Cheng
  • , Yanqin Zhang
  • , Jinyao Wang
  • , Haonan Wang
  • , Yifan Xie
  • , Shuaidi Zhang
  • , Changrui Liu
  • , Jingyun Chu
  • , Feng Zhang
  • , Zhenzhong Yang
  • , Zilong Zheng
  • , Mingjian Wu
  • , Ling Li
  • , Mengmeng Li*
  • *Corresponding author for this work
  • Chinese Academy of Sciences
  • CAS - Institute of Microelectronics
  • University of Chinese Academy of Sciences
  • East China Normal University
  • Beijing University of Technology
  • Friedrich-Alexander University Erlangen-Nürnberg

Research output: Contribution to journalArticlepeer-review

Abstract

The monolayer transistor, where the semiconductor layer is a single molecular layer, offers an ideal platform for exploring transport mechanisms both theoretically and experimentally by eliminating the influence of spatially correlated microstructure. However, the structure-property relations in polymer monolayers remain poorly understood, leading to low transistor performance to date. Herein, a self-confinement effect is demonstrated in the polymer monolayer with nanofibrillar microstructures and edge-on orientation, as characterized by the 4D scanning confocal electron diffraction method. The polymer chains align parallel to the nanofiber long axis, while the π-stacking direction aligns perpendicular to this axis. To reduce the trap density at the semiconductor/dielectric interface, a top-gate configuration is employed with CYTOP as gate dielectric, and the resulting monolayer transistors achieve a field-effect mobility of 7.12 cm2 V−1 s−1, an on/off ratio of 10⁸, and a subthreshold swing of 0.21 V dec−1, among the performance records for polymer monolayer transistors. Notably, the top-gate architecture allows self-encapsulation, and the monolayer network induces the morphologic lock effect, contributing to a remarkable device stability over 1260 days. Additionally, the low thermal budget of this polymer monolayer transistor enables the monolithic 3D integration with n-type oxide transistor, resulting in hybrid complementary inverters with reasonable voltage amplification capabilities.

Original languageEnglish
Article numbere15591
JournalAdvanced Materials
Volume38
Issue number8
DOIs
StatePublished - 6 Feb 2026

Keywords

  • complementary logics
  • device stability
  • monolithic 3D integration
  • polymer monolayer transistors
  • structure-property relation

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