TY - JOUR
T1 - High-index-contrast single-mode optical waveguides fabricated on lithium niobate by photolithography assisted chemo-mechanical etching (PLACE)
AU - Zhang, Jianhao
AU - Wu, Rongbo
AU - Wang, Min
AU - Fang, Zhiwei
AU - Lin, Jintian
AU - Zhou, Junxia
AU - Gao, Renhong
AU - Chu, Wei
AU - Cheng, Ya
N1 - Publisher Copyright:
© 2020 The Japan Society of Applied Physics.
PY - 2020/8/1
Y1 - 2020/8/1
N2 - We report fabrication of low loss infrared single mode (1550 nm) waveguides on lithium niobate on insulator cladded by a layer of SiO2. Our technique, termed photolithography assisted chemo-mechanical etching, relies on patterning of a chromium film into the mask shape by femtosecond laser micromachining and subsequent chemo-mechanical etching of the lithium niobate thin film. The high-index-contrast single mode waveguide is measured to have a propagation loss of 0.130 ± 0.008 dB cm-1. Furthermore, waveguide tapers are fabricated for boosting the coupling efficiency.
AB - We report fabrication of low loss infrared single mode (1550 nm) waveguides on lithium niobate on insulator cladded by a layer of SiO2. Our technique, termed photolithography assisted chemo-mechanical etching, relies on patterning of a chromium film into the mask shape by femtosecond laser micromachining and subsequent chemo-mechanical etching of the lithium niobate thin film. The high-index-contrast single mode waveguide is measured to have a propagation loss of 0.130 ± 0.008 dB cm-1. Furthermore, waveguide tapers are fabricated for boosting the coupling efficiency.
UR - https://www.scopus.com/pages/publications/85088980145
U2 - 10.35848/1347-4065/aba0d6
DO - 10.35848/1347-4065/aba0d6
M3 - 文章
AN - SCOPUS:85088980145
SN - 0021-4922
VL - 59
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
IS - 8
M1 - 086503
ER -