@inproceedings{b56c0d9e0cc64872ba60964a8161a003,
title = "Growth of highly (h00) oriented barium strontium titanate films on silicon substrates using conducting LaNiO3 electrode",
abstract = "(Ba,Sr)TiO3 (BST) thin films were deposited on the conducting perovskite LaNiO3 electrode by radio-frequency (rf) magnetron sputtering technique. To investigate the crystalline of BST films, the substrate temperatures (Td) in the range of 100°C-700°C were applied. The transition from amorphous phase to polycrystalline phase for the films occurred at low growth temperature 300°C. When the growth temperature approached 500°C, highly (h00)-oriented films were obtained. The relative dielectric constant (εr) increased rapidly with enhancing growth temperature because of improved crystallinity, and showed slowly increase above 500°C. In addition, the capacitance-voltage characteristics were studied with various growth temperatures. The tunability increased largely with good crystallinity. This can be attributed to increased dielectric constants.",
keywords = "(Ba, Sr)TiO thin films, LaNiO electrode",
author = "Gao, \{Y. H.\} and Ma, \{J. H.\} and Sun, \{J. L.\} and Meng, \{X. J.\} and Chu, \{J. H.\}",
year = "2008",
doi = "10.1117/12.793167",
language = "英语",
isbn = "9780819471826",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Sixth International Conference on Thin Film Physics and Applications",
note = "6th International Conference on Thin Film Physics and Applications, TFPA 2007 ; Conference date: 25-09-2007 Through 28-09-2007",
}