Abstract
Using phenylcarbyne polymer as a precursor, flake-like diamond crystals can be grown by conventional hot filament chemical vapor deposition system (HF-CVD) in methane and hydrogen mixture. The flake-like diamond crystals which show two dimensional (layer by layer) growth features formed in the temperature range of 500°C to 700°C. The large flattened diamond crystals several tens of micrometers in size have been observed. It is proposed that a single crystalline diamond layer formed using polymer precursor in the initial nucleation process, followed by homo-epitaxial growth resulting in the formation of single crystalline diamond thin film.
| Original language | English |
|---|---|
| Pages (from-to) | 159-162 |
| Number of pages | 4 |
| Journal | Thin Solid Films |
| Volume | 308-309 |
| Issue number | 1-4 |
| DOIs | |
| State | Published - 31 Oct 1997 |
| Externally published | Yes |
Keywords
- Diamond crystal
- Flakes
- Layer growth
- Polymer precursor