Gas sensing properties of NiO/SnO2 heterojunction thin film

Jiabin Fang, Yiping Zhu*, Dajun Wu, Chi Zhang, Shaohui Xu, Dayuan Xiong, Pingxiong Yang, Lianwei Wang, Paul K. Chu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

71 Scopus citations

Abstract

The application of conventional tin oxide thin film sensors is limited by its low response. In this study, a heterojunction thin film composed of nickel oxide deposited by electron beam evaporation and tin oxide prepared by radio-frequency (RF) magnetron sputtering has enhanced gaseous ethanol sensing properties. The 5 nm NiO/100 nm SnO2 gas sensor shows the excellent response 7.9 at 250 °C for 100 ppm gaseous ethanol, good reproducibility, as well as good linearity. In addition, this sensor can measure the ultra-low concentration of gaseous ethanol, and the concentration can be as low as 100 ppb. The gas sensitive properties is related to the thickness of nickel oxide and the mechanism is discussed.

Original languageEnglish
Pages (from-to)1163-1168
Number of pages6
JournalSensors and Actuators B: Chemical
Volume252
DOIs
StatePublished - 2017

Keywords

  • Gas sensor
  • Gaseous ethanol
  • Heterojunction
  • Nickel oxide
  • Tin oxide

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