Fundamentals of femtosecond laser processing

Koji Sugioka; Ya Cheng

doi:10.1007/978-1-4471-5541-6_3

Fundamentals of femtosecond laser processing

Koji Sugioka^*
, Ya Cheng

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

Femtosecond lasers have excellent characteristics for materials processing due to their ultrashort pulse widths and extremely high peak powers. When a femtosecond laser beam with a moderate pulse energy is focused into glass, multiphoton absorption or tunneling ionization is confined to a region near the focal point inside the glass. Femtosecond lasers can thus perform internal modification of glass. Internal modification is widely used to fabricate microfluidic structures and micro-optical components, which can be used to produce biomicrochips for biochemical analysis. This chapter reviews the fundamentals and characteristics of femtosecond laser processing. It also introduces state-of-the-art femtosecond laser processing.

Original language	English
Pages (from-to)	19-33
Number of pages	15
Journal	SpringerBriefs in Applied Sciences and Technology
Issue number	9781447155409
DOIs	https://doi.org/10.1007/978-1-4471-5541-6_3
State	Published - 2014
Externally published	Yes

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@article{d6582f55f3244b39896ec2813582beb5,

title = "Fundamentals of femtosecond laser processing",

abstract = "Femtosecond lasers have excellent characteristics for materials processing due to their ultrashort pulse widths and extremely high peak powers. When a femtosecond laser beam with a moderate pulse energy is focused into glass, multiphoton absorption or tunneling ionization is confined to a region near the focal point inside the glass. Femtosecond lasers can thus perform internal modification of glass. Internal modification is widely used to fabricate microfluidic structures and micro-optical components, which can be used to produce biomicrochips for biochemical analysis. This chapter reviews the fundamentals and characteristics of femtosecond laser processing. It also introduces state-of-the-art femtosecond laser processing.",

author = "Koji Sugioka and Ya Cheng",

note = "Publisher Copyright: {\textcopyright} 2014, The Author(s).",

year = "2014",

doi = "10.1007/978-1-4471-5541-6\_3",

language = "英语",

pages = "19--33",

journal = "SpringerBriefs in Applied Sciences and Technology",

issn = "2191-530X",

publisher = "Springer Publishing Company",

number = "9781447155409",

}

TY - JOUR

T1 - Fundamentals of femtosecond laser processing

AU - Sugioka, Koji

AU - Cheng, Ya

PY - 2014

Y1 - 2014

N2 - Femtosecond lasers have excellent characteristics for materials processing due to their ultrashort pulse widths and extremely high peak powers. When a femtosecond laser beam with a moderate pulse energy is focused into glass, multiphoton absorption or tunneling ionization is confined to a region near the focal point inside the glass. Femtosecond lasers can thus perform internal modification of glass. Internal modification is widely used to fabricate microfluidic structures and micro-optical components, which can be used to produce biomicrochips for biochemical analysis. This chapter reviews the fundamentals and characteristics of femtosecond laser processing. It also introduces state-of-the-art femtosecond laser processing.

AB - Femtosecond lasers have excellent characteristics for materials processing due to their ultrashort pulse widths and extremely high peak powers. When a femtosecond laser beam with a moderate pulse energy is focused into glass, multiphoton absorption or tunneling ionization is confined to a region near the focal point inside the glass. Femtosecond lasers can thus perform internal modification of glass. Internal modification is widely used to fabricate microfluidic structures and micro-optical components, which can be used to produce biomicrochips for biochemical analysis. This chapter reviews the fundamentals and characteristics of femtosecond laser processing. It also introduces state-of-the-art femtosecond laser processing.

UR - https://www.scopus.com/pages/publications/85015891244

U2 - 10.1007/978-1-4471-5541-6_3

DO - 10.1007/978-1-4471-5541-6_3

M3 - 文章

AN - SCOPUS:85015891244

SN - 2191-530X

SP - 19

EP - 33

JO - SpringerBriefs in Applied Sciences and Technology

JF - SpringerBriefs in Applied Sciences and Technology

IS - 9781447155409

ER -

Fundamentals of femtosecond laser processing

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