Abstract
Large-scale microfluidic microsystems with complex 3D configurations are highly in demand by both fundamental research and industrial application, holding the potentials for fostering a wide range of innovative applications such as organ-on-a-chip as well as continuous-flow manufacturing. However, freeform fabrication of such systems remains challenging for current fabrication techniques in terms of fabrication resolution, flexibility, and achievable footprint size. Herein, ultrashort pulse laser microfabrication of freeform microfluidic circuits with high aspect ratios embedded in 3D printed glass macroscale objects is reported. Centimeter-length microchannels with uniform diameters are achieved by distributing a string of extra-access ports along the channels for avoiding the overetching. After the chemical etching, the extra-access ports are sealed using carbon dioxide laser–induced localized glass melting. A model hand of 3D laser–printed fused silica with a size of ≈3 cm × 2.7 cm × 1.1 cm in which the whole blood vessel system is encapsulated is demonstrated.
| Original language | English |
|---|---|
| Article number | 1900989 |
| Journal | Advanced Materials Technologies |
| Volume | 5 |
| Issue number | 2 |
| DOIs | |
| State | Published - 1 Feb 2020 |
Keywords
- 3D glass printing
- 3D microfluidics
- CO laser–induced melting
- laser-assisted etching
- ultrashort pulse laser microfabrication
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