Formation of porous silicon array by using highly resistive silicon as masking material

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	63
Number of pages	1
Journal	Gongneng Cailiao yu Qijian Xuebao/Journal of Functional Materials and Devices
Volume	10
Issue number	1
State	Published - Mar 2004
Externally published	Yes

Cite this

@article{d2d3ace6998d4007a66507cd2443a407,

title = "Formation of porous silicon array by using highly resistive silicon as masking material",

author = "Chen, \{Shao Qiang\} and Zhu, \{Jian Zhong\} and Zhu, \{Zi Qiang\} and Li Shao and Wang, \{Wei Ming\} and Ke Yu",

year = "2004",

month = mar,

language = "英语",

volume = "10",

pages = "63",

journal = "Gongneng Cailiao yu Qijian Xuebao/Journal of Functional Materials and Devices",

issn = "1007-4252",

publisher = "Chinese Academy of Sciences",

number = "1",

}

TY - JOUR

T1 - Formation of porous silicon array by using highly resistive silicon as masking material

AU - Chen, Shao Qiang

AU - Zhu, Jian Zhong

AU - Zhu, Zi Qiang

AU - Shao, Li

AU - Wang, Wei Ming

AU - Yu, Ke

PY - 2004/3

Y1 - 2004/3

UR - https://www.scopus.com/pages/publications/2942640169

M3 - 文章

AN - SCOPUS:2942640169

SN - 1007-4252

VL - 10

SP - 63

JO - Gongneng Cailiao yu Qijian Xuebao/Journal of Functional Materials and Devices

JF - Gongneng Cailiao yu Qijian Xuebao/Journal of Functional Materials and Devices

IS - 1

ER -