Flexible thermistors: MCNO films with low resistivity and high TCR deposited on flexible organic sheets by RF magnetron sputtering

Jing Wu, Zhiming Huang, Lin Jiang, Yanqing Gao, Wei Zhou, Junhao Chu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Mn-Co-Ni-O (MCNO) flexible thermistors are fabricated on polyethylene terephthalate or polyimide sheets by RF magnetron sputtering method at room temperature. The whole fabricating processes is completed at room temperature. The temperature coefficient of resistance (TCR) is -3.1% and resistivity as low as 110Ωcm at 295K. The bendingstraightening cycle test indicates the flexible MCNO sheet is stable. The temperature sensing test shows the thermistors respond to temperature change rapidly and sensitively. Due to the heat-treat free process, high TCR and moderate resistivity features, the technique we provide here allows a convenient and low cost industrial manufacture of high performance flexible thermistors and wide band infrared detectors.

Original languageEnglish
Title of host publicationInfrared Remote Sensing and Instrumentation XXV
EditorsMarija Strojnik, Maureen S. Kirk
PublisherSPIE
ISBN (Electronic)9781510612631
DOIs
StatePublished - 2017
Externally publishedYes
EventInfrared Remote Sensing and Instrumentation XXV 2017 - San Diego, United States
Duration: 7 Aug 20178 Aug 2017

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10403
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceInfrared Remote Sensing and Instrumentation XXV 2017
Country/TerritoryUnited States
CitySan Diego
Period7/08/178/08/17

Keywords

  • Flexible thermistors
  • Infrared detection
  • Negative temperature coefficients

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