Flexible thermistors for far infrared detection: MCNO films with low resistivity and high TCR deposited on flexible organic sheets

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

MCNO flexible thermistors have been fabricated on polyethylene terephthalate or polyimide sheets by RF magnetron sputtering method at room temperature. The whole fabricating processes have been done at room temperature. The temperature coefficient of resistance is -3.1% and resistivity as low as 110Ωcm at 295K. Due to the heat-treat free process, high TCR and moderate resistivity features, the technique we provide here allows a convenient and low cost industrial manufacture of high performance flexible thermistors and wide band infrared detectors.

Original languageEnglish
Title of host publication2017 42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017
PublisherIEEE Computer Society
ISBN (Electronic)9781509060481
DOIs
StatePublished - 12 Oct 2017
Externally publishedYes
Event42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017 - Cancun, Quintana Roo, Mexico
Duration: 27 Aug 20171 Sep 2017

Publication series

NameInternational Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
ISSN (Print)2162-2027
ISSN (Electronic)2162-2035

Conference

Conference42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017
Country/TerritoryMexico
CityCancun, Quintana Roo
Period27/08/171/09/17

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