Flexible Solar-Blind Photodetectors Based on β-Ga2O3 Films Transferred by a Stamp-Based Printing Technique

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Abstract

A stamp-based printing technique was applied to transfer the β-Ga2O3 films grown by pulsed laser deposition (PLD) from Si substrates onto some flexible substrates, such as PET, PEN, and PI. It is demonstrated that the β-Ga2O3-based flexible solar-blind photodetectors (SBPDs) exhibit brilliant optoelectrical performances with a low dark current of 1.7 pA at 10 V, a I254nm/Idark ratio of 1.2 × 103, rise (τr1 = 0.079 s and τr2 = 0.413 s) and decay (τd1 = 0.029 s and τd2 = 0.316 s) times. In a further step, flexible imaging sensor arrays based on the β-Ga2O3/PET were fabricated, which exhibit good imaging capability and resolution. Moreover, wearable UVC-alarms based on the β-Ga2O3/PET were realized to monitor the UVC radiation in the environment in real time, which can be used in the COVID-19-related area.

Original languageEnglish
Pages (from-to)1921-1924
Number of pages4
JournalIEEE Electron Device Letters
Volume43
Issue number11
DOIs
StatePublished - 1 Nov 2022
Externally publishedYes

Keywords

  • flexible solar-blind photodetectors
  • pulsed laser deposition
  • stamp-based printing technique
  • β-GaO films

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