Field emission from heat-treated cobalt-containing amorphous carbon composite films on glass substrate

Y. J. Li; S. P. Lau; B. K. Tay; Z. Sun; G. Y. Chen; J. S. Chen; X. Z. Ding

doi:10.1116/1.1372918

Field emission from heat-treated cobalt-containing amorphous carbon composite films on glass substrate

Y. J. Li, S. P. Lau, B. K. Tay, Z. Sun, G. Y. Chen, J. S. Chen, X. Z. Ding

Nanyang Technological University

Research output: Contribution to journal › Conference article › peer-review

3 Scopus citations

Abstract

The field emission from heat treated cobalt containing carbon films was reported. The films were grown on glass substrates by means of filtered cathodic vacuum arc (FCVA) technique at low temperature in acetylene and nitrogen ambients. The heat-treated films retained smooth surface with a root mean square roghness, which could be used in the fabrication of gated emitter array for field emission displays.

Original language	English
Pages (from-to)	950-953
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	19
Issue number	3
DOIs	https://doi.org/10.1116/1.1372918
State	Published - May 2001
Externally published	Yes
Event	13th International Vaccum Microelectronics Conference - Guangzhou, China Duration: 14 Aug 2000 → 17 Aug 2000

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title = "Field emission from heat-treated cobalt-containing amorphous carbon composite films on glass substrate",

abstract = "The field emission from heat treated cobalt containing carbon films was reported. The films were grown on glass substrates by means of filtered cathodic vacuum arc (FCVA) technique at low temperature in acetylene and nitrogen ambients. The heat-treated films retained smooth surface with a root mean square roghness, which could be used in the fabrication of gated emitter array for field emission displays.",

author = "Li, \{Y. J.\} and Lau, \{S. P.\} and Tay, \{B. K.\} and Z. Sun and Chen, \{G. Y.\} and Chen, \{J. S.\} and Ding, \{X. Z.\}",

year = "2001",

month = may,

doi = "10.1116/1.1372918",

language = "英语",

volume = "19",

pages = "950--953",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

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number = "3",

note = "13th International Vaccum Microelectronics Conference ; Conference date: 14-08-2000 Through 17-08-2000",

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T1 - Field emission from heat-treated cobalt-containing amorphous carbon composite films on glass substrate

AU - Li, Y. J.

AU - Lau, S. P.

AU - Tay, B. K.

AU - Sun, Z.

AU - Chen, G. Y.

AU - Chen, J. S.

AU - Ding, X. Z.

PY - 2001/5

Y1 - 2001/5

N2 - The field emission from heat treated cobalt containing carbon films was reported. The films were grown on glass substrates by means of filtered cathodic vacuum arc (FCVA) technique at low temperature in acetylene and nitrogen ambients. The heat-treated films retained smooth surface with a root mean square roghness, which could be used in the fabrication of gated emitter array for field emission displays.

AB - The field emission from heat treated cobalt containing carbon films was reported. The films were grown on glass substrates by means of filtered cathodic vacuum arc (FCVA) technique at low temperature in acetylene and nitrogen ambients. The heat-treated films retained smooth surface with a root mean square roghness, which could be used in the fabrication of gated emitter array for field emission displays.

UR - https://www.scopus.com/pages/publications/0035326367

U2 - 10.1116/1.1372918

DO - 10.1116/1.1372918

M3 - 会议文章

AN - SCOPUS:0035326367

SN - 1071-1023

VL - 19

SP - 950

EP - 953

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 3

T2 - 13th International Vaccum Microelectronics Conference

Y2 - 14 August 2000 through 17 August 2000

ER -

Field emission from heat-treated cobalt-containing amorphous carbon composite films on glass substrate

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