Femtosecond laser nanostructuring in porous glass with sub-50 nm feature sizes

Yang Liao; Yinglong Shen; Lingling Qiao; Danping Chen; Ya Cheng; Koji Sugioka; Katsumi Midorikawa

doi:10.1364/OL.38.000187

Femtosecond laser nanostructuring in porous glass with sub-50 nm feature sizes

Yang Liao, Yinglong Shen, Lingling Qiao, Danping Chen, Ya Cheng, Koji Sugioka, Katsumi Midorikawa

Research output: Contribution to journal › Article › peer-review

101 Scopus citations

Abstract

We report on controllable production of nanostructures embedded in a porous glass by femtosecond laser direct writing. We show that a hollow nanovoid with a lateral size of ~40 nm and an axial size of ~1500 nm can be achieved by manipulating the peak intensity and polarization of the writing laser beam. Our finding enables applications ranging from direct construction of 3D nanofluidics in glass to clean stealth dicing of transparent plates.

Original language	English
Pages (from-to)	187-189
Number of pages	3
Journal	Optics Letters
Volume	38
Issue number	2
DOIs	https://doi.org/10.1364/OL.38.000187
State	Published - 15 Jan 2013
Externally published	Yes

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abstract = "We report on controllable production of nanostructures embedded in a porous glass by femtosecond laser direct writing. We show that a hollow nanovoid with a lateral size of \textasciitilde{}40 nm and an axial size of \textasciitilde{}1500 nm can be achieved by manipulating the peak intensity and polarization of the writing laser beam. Our finding enables applications ranging from direct construction of 3D nanofluidics in glass to clean stealth dicing of transparent plates.",

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AU - Liao, Yang

AU - Shen, Yinglong

AU - Qiao, Lingling

AU - Chen, Danping

AU - Cheng, Ya

AU - Sugioka, Koji

AU - Midorikawa, Katsumi

PY - 2013/1/15

Y1 - 2013/1/15

N2 - We report on controllable production of nanostructures embedded in a porous glass by femtosecond laser direct writing. We show that a hollow nanovoid with a lateral size of ~40 nm and an axial size of ~1500 nm can be achieved by manipulating the peak intensity and polarization of the writing laser beam. Our finding enables applications ranging from direct construction of 3D nanofluidics in glass to clean stealth dicing of transparent plates.

AB - We report on controllable production of nanostructures embedded in a porous glass by femtosecond laser direct writing. We show that a hollow nanovoid with a lateral size of ~40 nm and an axial size of ~1500 nm can be achieved by manipulating the peak intensity and polarization of the writing laser beam. Our finding enables applications ranging from direct construction of 3D nanofluidics in glass to clean stealth dicing of transparent plates.

UR - https://www.scopus.com/pages/publications/84872504512

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DO - 10.1364/OL.38.000187

M3 - 文章

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VL - 38

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Femtosecond laser nanostructuring in porous glass with sub-50 nm feature sizes

Abstract

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