Femtosecond laser microprocessing with threedimensionally isotropic spatial resolution using crossed-beam irradiation

Koji Sugioka; Ya Cheng; Katsumi Midorikawa; Fumihiro Takase; Hiroshi Takai

doi:10.1364/OL.31.000208

Femtosecond laser microprocessing with threedimensionally isotropic spatial resolution using crossed-beam irradiation

Koji Sugioka
, Ya Cheng
, Katsumi Midorikawa
, Fumihiro Takase
, Hiroshi Takai

Research output: Contribution to journal › Article › peer-review

41 Scopus citations

Abstract

We describe the use of a crossed-beam irradiation system in three-dimensional femtosecond laser microprocessing to obtain three-dimensionally isotropic spatial resolution. In the crossed-beam geometry, two orthogonal objective lenses are arranged to share a common focal point. The synthesized focal spot produces an isotropic illumination volume. We demonstrate that microfluidic channels with substantially circular crosssectional shapes can be directly fabricated inside glass by using the crossed-beam irradiation system.

Original language	English
Pages (from-to)	208-210
Number of pages	3
Journal	Optics Letters
Volume	31
Issue number	2
DOIs	https://doi.org/10.1364/OL.31.000208
State	Published - 15 Jan 2006
Externally published	Yes

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abstract = "We describe the use of a crossed-beam irradiation system in three-dimensional femtosecond laser microprocessing to obtain three-dimensionally isotropic spatial resolution. In the crossed-beam geometry, two orthogonal objective lenses are arranged to share a common focal point. The synthesized focal spot produces an isotropic illumination volume. We demonstrate that microfluidic channels with substantially circular crosssectional shapes can be directly fabricated inside glass by using the crossed-beam irradiation system.",

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AU - Sugioka, Koji

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AU - Midorikawa, Katsumi

AU - Takase, Fumihiro

AU - Takai, Hiroshi

PY - 2006/1/15

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N2 - We describe the use of a crossed-beam irradiation system in three-dimensional femtosecond laser microprocessing to obtain three-dimensionally isotropic spatial resolution. In the crossed-beam geometry, two orthogonal objective lenses are arranged to share a common focal point. The synthesized focal spot produces an isotropic illumination volume. We demonstrate that microfluidic channels with substantially circular crosssectional shapes can be directly fabricated inside glass by using the crossed-beam irradiation system.

AB - We describe the use of a crossed-beam irradiation system in three-dimensional femtosecond laser microprocessing to obtain three-dimensionally isotropic spatial resolution. In the crossed-beam geometry, two orthogonal objective lenses are arranged to share a common focal point. The synthesized focal spot produces an isotropic illumination volume. We demonstrate that microfluidic channels with substantially circular crosssectional shapes can be directly fabricated inside glass by using the crossed-beam irradiation system.

UR - https://www.scopus.com/pages/publications/33644540529

U2 - 10.1364/OL.31.000208

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M3 - 文章

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Femtosecond laser microprocessing with threedimensionally isotropic spatial resolution using crossed-beam irradiation

Abstract

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