Abstract
We report on the fabrication of various types of microand ano-scale functional structures, such as microoptical, icrofluidic, and microelectronic components, n glass materials using femtosecond laser micro/nanomachining. We show that high-aspect-ratio microfluidic hannels and micro-optical lenses can be abricated on the fused silica substrate for constructing integrated optofluidic micro-systems, and microelectrodes can be formed in dielectric materials for ncorporating electro-optical functions into the hotonic and optofluidic micro-systems. Thus, emtosecond laser micro/nanomachining will open up broad spectrum of opportunities in the optofluidic nd optoelectronic applications.
| Original language | English |
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| Pages | 1182-1191 |
| Number of pages | 10 |
| State | Published - 2011 |
| Externally published | Yes |
| Event | 30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011 - Orlando, FL, United States Duration: 23 Oct 2011 → 27 Oct 2011 |
Conference
| Conference | 30th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2011 |
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| Country/Territory | United States |
| City | Orlando, FL |
| Period | 23/10/11 → 27/10/11 |