@inproceedings{d0918803043b44edafd5a0e5b58214f3,
title = "Femtosecond laser fabricated electrofluidic devices in glass for 3D manipulation of biological samples",
abstract = "Novel electrofluidic microdevices based on monolithic integration of 3D metal electrodes into 3D glass microchannels have been prepared by femtosecond (fs) laser hybrid microfabrication. 3D microchannels with smooth internal walls are first prepared in photosensitive glass by fs laser-assisted chemical wet etching process combined with post-annealing. Then, 3D electrode patterning in prepared glass channels is carried out by water-assisted fs-laser direct-write ablation using the same laser followed by electroless metal plating. Laser processing parameters are optimized and the roles of water during the laser irradiation are discussed. The fabricated electrofluidic devices are applied to demonstrate 3D electro-orientation of cells in microfluidic environments.",
keywords = "3D electrodes, Femtosecond laser processing, electro-orientation, electrofluidic devices, vertical electrodes",
author = "Jian Xu and Katsumi Midorikawa and Koji Sugioka",
note = "Publisher Copyright: Copyright {\textcopyright} 2016 SPIE.; Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI ; Conference date: 15-02-2016 Through 18-02-2016",
year = "2016",
doi = "10.1117/12.2208842",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Beat Neuenschwander and Stephan Roth and Grigoropoulos, \{Costas P.\} and Tetsuya Makimura",
booktitle = "Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI",
address = "美国",
}