Femtosecond laser direct writing of three-dimensional micro/nanofluidics in porous glass

Cheng Ya; Yang Liao; Koji Sugioka

doi:10.1051/matecconf/20130805002

Femtosecond laser direct writing of three-dimensional micro/nanofluidics in porous glass

Cheng Ya, Yang Liao, Koji Sugioka

Research output: Contribution to journal › Conference article › peer-review

Abstract

In this contribution, we show that 3D micro-/nanofluidic components with arbitrary geometries and configurations can be directly formed inside glass by femtosecond laser direct writing. We further demonstrate that nanofluidic channels of a width of ~40 nm can be directly fabricated in glass with linearly polarized femtosecond laser pulses, enabled by intentionally producing embedded nanograting structures with laser intensities slightly above a threshold value.

Original language	English
Article number	05002
Journal	MATEC Web of Conferences
Volume	8
DOIs	https://doi.org/10.1051/matecconf/20130805002
State	Published - 2013
Externally published	Yes
Event	Workshop on Progress in Ultrafast Laser Modifications of Materials, 2013 - Cargese, France Duration: 14 Apr 2013 → 19 Apr 2013

Access to Document

10.1051/matecconf/20130805002

Cite this

@article{23723918e24b40c6b56ede3e1c064cd9,

title = "Femtosecond laser direct writing of three-dimensional micro/nanofluidics in porous glass",

abstract = "In this contribution, we show that 3D micro-/nanofluidic components with arbitrary geometries and configurations can be directly formed inside glass by femtosecond laser direct writing. We further demonstrate that nanofluidic channels of a width of \textasciitilde{}40 nm can be directly fabricated in glass with linearly polarized femtosecond laser pulses, enabled by intentionally producing embedded nanograting structures with laser intensities slightly above a threshold value.",

author = "Cheng Ya and Yang Liao and Koji Sugioka",

year = "2013",

doi = "10.1051/matecconf/20130805002",

language = "英语",

volume = "8",

journal = "MATEC Web of Conferences",

issn = "2261-236X",

note = "Workshop on Progress in Ultrafast Laser Modifications of Materials, 2013 ; Conference date: 14-04-2013 Through 19-04-2013",

}

TY - JOUR

T1 - Femtosecond laser direct writing of three-dimensional micro/nanofluidics in porous glass

AU - Ya, Cheng

AU - Liao, Yang

AU - Sugioka, Koji

PY - 2013

Y1 - 2013

N2 - In this contribution, we show that 3D micro-/nanofluidic components with arbitrary geometries and configurations can be directly formed inside glass by femtosecond laser direct writing. We further demonstrate that nanofluidic channels of a width of ~40 nm can be directly fabricated in glass with linearly polarized femtosecond laser pulses, enabled by intentionally producing embedded nanograting structures with laser intensities slightly above a threshold value.

AB - In this contribution, we show that 3D micro-/nanofluidic components with arbitrary geometries and configurations can be directly formed inside glass by femtosecond laser direct writing. We further demonstrate that nanofluidic channels of a width of ~40 nm can be directly fabricated in glass with linearly polarized femtosecond laser pulses, enabled by intentionally producing embedded nanograting structures with laser intensities slightly above a threshold value.

UR - https://www.scopus.com/pages/publications/84903184541

U2 - 10.1051/matecconf/20130805002

DO - 10.1051/matecconf/20130805002

M3 - 会议文章

AN - SCOPUS:84903184541

SN - 2261-236X

VL - 8

JO - MATEC Web of Conferences

JF - MATEC Web of Conferences

M1 - 05002

T2 - Workshop on Progress in Ultrafast Laser Modifications of Materials, 2013

Y2 - 14 April 2013 through 19 April 2013

ER -

Femtosecond laser direct writing of three-dimensional micro/nanofluidics in porous glass

Abstract

Access to Document

Other files and links

Fingerprint

Cite this