@inproceedings{b6550d52b0c140ffa9b5485d3e282f1c,
title = "Femtosecond laser direct writing of high-Q microresonators in glass and crystals",
abstract = "We report on fabrication of microresonators of high quality (high-Q) factors in both glass and crystalline materials by femtosecond laser 3D micromachining. Based on this novel approach, we obtained high-Q microresonators of non-inplane geometries in glass materials such as fused silica and Nd: glass and demonstrated lasing at a pump power as low as 69 microwatts. We also fabricated on-chip microresonators of sub-100 μm diameters in crystalline materials including calcium fluoride and lithium niobate, and demonstrated efficient second harmonic generation using the high-Q lithium niobate microresonator. Furthermore, femtosecond laser 3D micromachining allows direct integration of the microresonators with other functional microcomponents, such as a microfluidic mixer and a microheater, leading to compact microdevices with enhanced functionalities. Our technique opens new avenues for fabricating high-Q microresonators with either 2D or 3D geometries on various types of dielectric materials.",
keywords = "3D microstructure, Femtosecond laser micromachining, Integration, Microresonator, Nonlinear optics, Optofluidics",
author = "Jintian Lin and Yingxin Xu and Jiangxin Song and Jialei Tang and Zhiwei Fang and Min Wang and Wei Fang and Ya Cheng",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE CCC.; Laser Resonators, Microresonators, and Beam Control XVII ; Conference date: 09-02-2015 Through 12-02-2015",
year = "2015",
doi = "10.1117/12.2071737",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Paxton, \{Alan H.\} and Ilchenko, \{Vladimir S.\} and Kunihiko Washio and Kudryashov, \{Alexis V.\} and Lutz Aschke",
booktitle = "Laser Resonators, Microresonators, and Beam Control XVII",
address = "美国",
}