Fabrication of ultra-high-Q Ta2O5 microdisk by photolithography assisted chemo-mechanical etching

Renhong Gao; Minghui Li; Guanghui Zhao; Jintian Lin; Jianglin Guan; Chuntao Li; Min Wang; Lingling Qiao; Ya Cheng

Fabrication of ultra-high-Q Ta₂O₅ microdisk by photolithography assisted chemo-mechanical etching

Renhong Gao
, Minghui Li
, Guanghui Zhao
, Jintian Lin
, Jianglin Guan
, Chuntao Li
, Min Wang
, Lingling Qiao
, Ya Cheng^*

^*Corresponding author for this work

School of Physics and Electronic Science

Research output: Contribution to conference › Paper › peer-review

Abstract

High-Q whispering gallery modes (WGMs) microdisks on amorphous Ta₂O₅ films are fabricated by femtosecond laser photolithography assisted chemo-mechanical etching. The loaded Q factor of the microresonator with a diameter of 120 μm reaches 1.92×10⁶

Original language	English
State	Published - 2024
Event	2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024 - Incheon, Korea, Republic of Duration: 4 Aug 2024 → 8 Aug 2024

Conference

Conference	2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024
Country/Territory	Korea, Republic of
City	Incheon
Period	4/08/24 → 8/08/24

Cite this

@conference{5816c0c094004aeb92796749dfa2fb3c,

title = "Fabrication of ultra-high-Q Ta2O5 microdisk by photolithography assisted chemo-mechanical etching",

abstract = "High-Q whispering gallery modes (WGMs) microdisks on amorphous Ta2O5 films are fabricated by femtosecond laser photolithography assisted chemo-mechanical etching. The loaded Q factor of the microresonator with a diameter of 120 μm reaches 1.92×106",

author = "Renhong Gao and Minghui Li and Guanghui Zhao and Jintian Lin and Jianglin Guan and Chuntao Li and Min Wang and Lingling Qiao and Ya Cheng",

note = "Publisher Copyright: {\textcopyright} 2024 The Author(s); 2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024 ; Conference date: 04-08-2024 Through 08-08-2024",

year = "2024",

language = "英语",

}

TY - CONF

T1 - Fabrication of ultra-high-Q Ta2O5 microdisk by photolithography assisted chemo-mechanical etching

AU - Gao, Renhong

AU - Li, Minghui

AU - Zhao, Guanghui

AU - Lin, Jintian

AU - Guan, Jianglin

AU - Li, Chuntao

AU - Wang, Min

AU - Qiao, Lingling

AU - Cheng, Ya

PY - 2024

Y1 - 2024

N2 - High-Q whispering gallery modes (WGMs) microdisks on amorphous Ta2O5 films are fabricated by femtosecond laser photolithography assisted chemo-mechanical etching. The loaded Q factor of the microresonator with a diameter of 120 μm reaches 1.92×106

AB - High-Q whispering gallery modes (WGMs) microdisks on amorphous Ta2O5 films are fabricated by femtosecond laser photolithography assisted chemo-mechanical etching. The loaded Q factor of the microresonator with a diameter of 120 μm reaches 1.92×106

UR - https://www.scopus.com/pages/publications/85216112017

M3 - 论文

AN - SCOPUS:85216112017

T2 - 2024 Conference on Lasers and Electro-Optics/Pacific Rim, CLEO-PR 2024

Y2 - 4 August 2024 through 8 August 2024

ER -

Fabrication of ultra-high-Q Ta₂O₅ microdisk by photolithography assisted chemo-mechanical etching

Abstract

Conference

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