Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

Jintian Lin; Yingxin Xu; Jialei Tang; Nengwen Wang; Jiangxin Song; Fei He; Wei Fang; Ya Cheng

doi:10.1007/s00339-014-8388-1

Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

Jintian Lin
, Yingxin Xu
, Jialei Tang
, Nengwen Wang
, Jiangxin Song
, Fei He
, Wei Fang
, Ya Cheng^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

24 Scopus citations

Abstract

We report on fabrication of on-chip calcium fluoride (CaF₂) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality (Q) factors of the fabricated microresonators are measured to be 4.2 × 10⁴ at wavelengths near 1,550 nm. The Q factor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. This technique facilitates the formation of on-chip microresonators on various kinds of bulk crystalline materials, which can benefit a wide range of applications such as nonlinear optics, quantum optics, and chip-level integration of photonic devices.

Original language	English
Pages (from-to)	2019-2023
Number of pages	5
Journal	Applied Physics A: Materials Science and Processing
Volume	116
Issue number	4
DOIs	https://doi.org/10.1007/s00339-014-8388-1
State	Published - Sep 2014
Externally published	Yes

Access to Document

10.1007/s00339-014-8388-1

Cite this

@article{ba370201e72e4089ab0d5e34d0a05d4a,

title = "Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining",

abstract = "We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality (Q) factors of the fabricated microresonators are measured to be 4.2 × 104 at wavelengths near 1,550 nm. The Q factor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. This technique facilitates the formation of on-chip microresonators on various kinds of bulk crystalline materials, which can benefit a wide range of applications such as nonlinear optics, quantum optics, and chip-level integration of photonic devices.",

author = "Jintian Lin and Yingxin Xu and Jialei Tang and Nengwen Wang and Jiangxin Song and Fei He and Wei Fang and Ya Cheng",

year = "2014",

month = sep,

doi = "10.1007/s00339-014-8388-1",

language = "英语",

volume = "116",

pages = "2019--2023",

journal = "Applied Physics A: Materials Science and Processing",

issn = "0947-8396",

publisher = "Springer Heidelberg",

number = "4",

}

TY - JOUR

T1 - Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

AU - Lin, Jintian

AU - Xu, Yingxin

AU - Tang, Jialei

AU - Wang, Nengwen

AU - Song, Jiangxin

AU - He, Fei

AU - Fang, Wei

AU - Cheng, Ya

PY - 2014/9

Y1 - 2014/9

N2 - We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality (Q) factors of the fabricated microresonators are measured to be 4.2 × 104 at wavelengths near 1,550 nm. The Q factor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. This technique facilitates the formation of on-chip microresonators on various kinds of bulk crystalline materials, which can benefit a wide range of applications such as nonlinear optics, quantum optics, and chip-level integration of photonic devices.

AB - We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality (Q) factors of the fabricated microresonators are measured to be 4.2 × 104 at wavelengths near 1,550 nm. The Q factor is mainly limited by the scattering from the bottom surface of the disk whose roughness remains high due to the femtosecond laser micromachining process. This technique facilitates the formation of on-chip microresonators on various kinds of bulk crystalline materials, which can benefit a wide range of applications such as nonlinear optics, quantum optics, and chip-level integration of photonic devices.

UR - https://www.scopus.com/pages/publications/84906322605

U2 - 10.1007/s00339-014-8388-1

DO - 10.1007/s00339-014-8388-1

M3 - 文章

AN - SCOPUS:84906322605

SN - 0947-8396

VL - 116

SP - 2019

EP - 2023

JO - Applied Physics A: Materials Science and Processing

JF - Applied Physics A: Materials Science and Processing

IS - 4

ER -

Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

Abstract

Access to Document

Other files and links

Fingerprint

Cite this