@inproceedings{fade18bbd731473d92da53e472b476f1,
title = "Fabrication of Raman biochip prototype by femtosecond laser micromachining",
abstract = "In this work, a nanoscale surface-enhanced Raman scattering (SERS) substrate is fabricated by fs laser reduction and deposition. The conductive silver microstructures are also deposited in fs laser irradiated area on the glass surfaces. Based on this approach, we integrate the microelectronic circuit and micro-Raman substrate into a microfluidic chamber and form a prototype of Raman biochip for biosensing. Enhancement of Raman signal and control of temperature of the sensor are both achieved. This technique provides a great potential for integrating microelectronics and micro-Raman sensors on a single glass chip.",
keywords = "Femtosecond laser micromachining, Raman Sensor, Surface metallization, Surface-enhanced Raman scattering",
author = "Zenghui Zhou and Jian Xu and Fei He and Yang Liao and Ya Cheng and Zhizhan Xu and Koji Sugioka and Katsumi Midorikawa",
year = "2010",
doi = "10.1117/12.864428",
language = "英语",
isbn = "9780819482556",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Biosensing III",
note = "Biosensing III ; Conference date: 01-08-2010 Through 03-08-2010",
}