Fabrication of optical microlenses in glass using a femtoseccond laser for LBA-on-a-chip applications

Y. Cheng; H. L. Tsai

Fabrication of optical microlenses in glass using a femtoseccond laser for LBA-on-a-chip applications

Y. Cheng, H. L. Tsai

Missouri University of Science and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We describe the fabrication of microoptical cylindrical and hemispherical lenses vertically embedded in a photosensitive Foturan glass by femtosecond (fs) laser three-dimensional (3D) micromachining. The process is mainly composed of four steps: (1) fs laser scanning in the photosensitive glass to form curved surfaces (spherical and/or cylindrical); (2) postannealing of the sample for modification of the exposed areas; (3) chemical etching of the sample for selective removal of the modified areas; and (4) second postannealing for smoothening the surfaces of the tiny lenses. We examine the focusing ability of the microoptical lenses using a He-Ne laser beam, showing great potential of using these microoptical lenses in lab-on-a-chip applications.

Original language	English
Title of host publication	Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Heat Transfer
Publisher	American Society of Mechanical Engineers (ASME)
ISBN (Print)	0791837904, 9780791837900
State	Published - 2006
Externally published	Yes
Event	2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Chicago, IL, United States Duration: 5 Nov 2006 → 10 Nov 2006

Publication series

Name	American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD
ISSN (Print)	0272-5673

Conference

Conference	2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006
Country/Territory	United States
City	Chicago, IL
Period	5/11/06 → 10/11/06

Cite this

Cheng, Y., & Tsai, H. L. (2006). Fabrication of optical microlenses in glass using a femtoseccond laser for LBA-on-a-chip applications. In Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Heat Transfer (American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD). American Society of Mechanical Engineers (ASME).

Cheng, Y. ; Tsai, H. L. / Fabrication of optical microlenses in glass using a femtoseccond laser for LBA-on-a-chip applications. Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Heat Transfer. American Society of Mechanical Engineers (ASME), 2006. (American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD).

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title = "Fabrication of optical microlenses in glass using a femtoseccond laser for LBA-on-a-chip applications",

abstract = "We describe the fabrication of microoptical cylindrical and hemispherical lenses vertically embedded in a photosensitive Foturan glass by femtosecond (fs) laser three-dimensional (3D) micromachining. The process is mainly composed of four steps: (1) fs laser scanning in the photosensitive glass to form curved surfaces (spherical and/or cylindrical); (2) postannealing of the sample for modification of the exposed areas; (3) chemical etching of the sample for selective removal of the modified areas; and (4) second postannealing for smoothening the surfaces of the tiny lenses. We examine the focusing ability of the microoptical lenses using a He-Ne laser beam, showing great potential of using these microoptical lenses in lab-on-a-chip applications.",

author = "Y. Cheng and Tsai, \{H. L.\}",

year = "2006",

language = "英语",

isbn = "0791837904",

series = "American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD",

publisher = "American Society of Mechanical Engineers (ASME)",

booktitle = "Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Heat Transfer",

address = "美国",

note = "2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 ; Conference date: 05-11-2006 Through 10-11-2006",

}

Cheng, Y & Tsai, HL 2006, Fabrication of optical microlenses in glass using a femtoseccond laser for LBA-on-a-chip applications. in Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Heat Transfer. American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD, American Society of Mechanical Engineers (ASME), 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006, Chicago, IL, United States, 5/11/06.

Fabrication of optical microlenses in glass using a femtoseccond laser for LBA-on-a-chip applications. / Cheng, Y.; Tsai, H. L.
Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Heat Transfer. American Society of Mechanical Engineers (ASME), 2006. (American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Cheng, Y.

AU - Tsai, H. L.

PY - 2006

Y1 - 2006

N2 - We describe the fabrication of microoptical cylindrical and hemispherical lenses vertically embedded in a photosensitive Foturan glass by femtosecond (fs) laser three-dimensional (3D) micromachining. The process is mainly composed of four steps: (1) fs laser scanning in the photosensitive glass to form curved surfaces (spherical and/or cylindrical); (2) postannealing of the sample for modification of the exposed areas; (3) chemical etching of the sample for selective removal of the modified areas; and (4) second postannealing for smoothening the surfaces of the tiny lenses. We examine the focusing ability of the microoptical lenses using a He-Ne laser beam, showing great potential of using these microoptical lenses in lab-on-a-chip applications.

AB - We describe the fabrication of microoptical cylindrical and hemispherical lenses vertically embedded in a photosensitive Foturan glass by femtosecond (fs) laser three-dimensional (3D) micromachining. The process is mainly composed of four steps: (1) fs laser scanning in the photosensitive glass to form curved surfaces (spherical and/or cylindrical); (2) postannealing of the sample for modification of the exposed areas; (3) chemical etching of the sample for selective removal of the modified areas; and (4) second postannealing for smoothening the surfaces of the tiny lenses. We examine the focusing ability of the microoptical lenses using a He-Ne laser beam, showing great potential of using these microoptical lenses in lab-on-a-chip applications.

UR - https://www.scopus.com/pages/publications/85196492710

M3 - 会议稿件

AN - SCOPUS:85196492710

SN - 0791837904

SN - 9780791837900

T3 - American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD

BT - Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Heat Transfer

PB - American Society of Mechanical Engineers (ASME)

T2 - 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006

Y2 - 5 November 2006 through 10 November 2006

ER -

Cheng Y, Tsai HL. Fabrication of optical microlenses in glass using a femtoseccond laser for LBA-on-a-chip applications. In Proceedings of 2006 ASME International Mechanical Engineering Congress and Exposition, IMECE2006 - Heat Transfer. American Society of Mechanical Engineers (ASME). 2006. (American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD).

Fabrication of optical microlenses in glass using a femtoseccond laser for LBA-on-a-chip applications

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