Fabrication of multielement arrays based on high-Tc superconducting microbolometers

Xintian Liu; Z. H. Liu; Yong Chang; Junhao Chu

doi:10.1117/12.408315

Fabrication of multielement arrays based on high-T_c superconducting microbolometers

Xintian Liu, Z. H. Liu, Yong Chang, Junhao Chu

CAS - Shanghai Institute of Technical Physics

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

The 4 X 4 element arrays based on high Tc superconducting infrared microbolometers have been fabricated using the micromachining technology. The detectivities D∗ for various bolometric elements are ranged from 1.2 X 10⁸ to 7.2 X 10⁸ cmHz^1/2w^-1 at the operating temperature approximately 88 K.

Original language	English
Pages (from-to)	532-534
Number of pages	3
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4086
DOIs	https://doi.org/10.1117/12.408315
State	Published - 2000
Externally published	Yes
Event	4th International Conference on Thin Film Physics and Applications - Shanghai, China Duration: 8 May 2000 → 11 May 2000

Keywords

Detector
Superconductor

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10.1117/12.408315

Cite this

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title = "Fabrication of multielement arrays based on high-Tc superconducting microbolometers",

abstract = "The 4 X 4 element arrays based on high Tc superconducting infrared microbolometers have been fabricated using the micromachining technology. The detectivities D∗ for various bolometric elements are ranged from 1.2 X 108 to 7.2 X 108 cmHz1/2w-1 at the operating temperature approximately 88 K.",

keywords = "Detector, Superconductor",

author = "Xintian Liu and Liu, \{Z. H.\} and Yong Chang and Junhao Chu",

note = "Publisher Copyright: {\textcopyright} 200 COPYRIGHT SPIE.; 4th International Conference on Thin Film Physics and Applications ; Conference date: 08-05-2000 Through 11-05-2000",

year = "2000",

doi = "10.1117/12.408315",

language = "英语",

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journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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TY - JOUR

T1 - Fabrication of multielement arrays based on high-Tc superconducting microbolometers

AU - Liu, Xintian

AU - Liu, Z. H.

AU - Chang, Yong

AU - Chu, Junhao

N1 - Publisher Copyright: © 200 COPYRIGHT SPIE.

PY - 2000

Y1 - 2000

N2 - The 4 X 4 element arrays based on high Tc superconducting infrared microbolometers have been fabricated using the micromachining technology. The detectivities D∗ for various bolometric elements are ranged from 1.2 X 108 to 7.2 X 108 cmHz1/2w-1 at the operating temperature approximately 88 K.

AB - The 4 X 4 element arrays based on high Tc superconducting infrared microbolometers have been fabricated using the micromachining technology. The detectivities D∗ for various bolometric elements are ranged from 1.2 X 108 to 7.2 X 108 cmHz1/2w-1 at the operating temperature approximately 88 K.

KW - Detector

KW - Superconductor

UR - https://www.scopus.com/pages/publications/84883871705

U2 - 10.1117/12.408315

DO - 10.1117/12.408315

M3 - 会议文章

AN - SCOPUS:84883871705

SN - 0277-786X

VL - 4086

SP - 532

EP - 534

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - 4th International Conference on Thin Film Physics and Applications

Y2 - 8 May 2000 through 11 May 2000

ER -

Fabrication of multielement arrays based on high-T_c superconducting microbolometers

Abstract

Keywords

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