Fabrication of microfluidic structures three-dimensionally embedded in glass by femtosecond laser

Masashi Masuda; Koji Sugioka; Ya Cheng; Masako Kawachi; Kazuhiko Shihotama; Koichi Toyoda; Katsumi Midorikawa

doi:10.1109/CLEOPR.2003.1277233

Fabrication of microfluidic structures three-dimensionally embedded in glass by femtosecond laser

Masashi Masuda, Koji Sugioka, Ya Cheng, Masako Kawachi, Kazuhiko Shihotama, Koichi Toyoda, Katsumi Midorikawa

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

Fabrication of hollow three-dimensional (3-D) microstructures embedded in a photosensitive glass by a femtosecond laser is demonstrated. This technique is applied for manufacturing microfluidic structures composed of microcells, microchannels, and microvalves.

Original language	English
Title of host publication	CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
Subtitle of host publication	Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	692
Number of pages	1
ISBN (Electronic)	0780377664
DOIs	https://doi.org/10.1109/CLEOPR.2003.1277233
State	Published - 2003
Externally published	Yes
Event	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan, Province of China Duration: 15 Dec 2003 → 19 Dec 2003

Publication series

Name	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Volume	2

Conference

Conference	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
Country/Territory	Taiwan, Province of China
City	Taipei
Period	15/12/03 → 19/12/03

Access to Document

10.1109/CLEOPR.2003.1277233

Cite this

Masuda, M., Sugioka, K., Cheng, Y., Kawachi, M., Shihotama, K., Toyoda, K., & Midorikawa, K. (2003). Fabrication of microfluidic structures three-dimensionally embedded in glass by femtosecond laser. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings (pp. 692). Article 1277233 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2003.1277233

Masuda, Masashi ; Sugioka, Koji ; Cheng, Ya et al. / Fabrication of microfluidic structures three-dimensionally embedded in glass by femtosecond laser. CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 692 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

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title = "Fabrication of microfluidic structures three-dimensionally embedded in glass by femtosecond laser",

abstract = "Fabrication of hollow three-dimensional (3-D) microstructures embedded in a photosensitive glass by a femtosecond laser is demonstrated. This technique is applied for manufacturing microfluidic structures composed of microcells, microchannels, and microvalves.",

author = "Masashi Masuda and Koji Sugioka and Ya Cheng and Masako Kawachi and Kazuhiko Shihotama and Koichi Toyoda and Katsumi Midorikawa",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 ; Conference date: 15-12-2003 Through 19-12-2003",

year = "2003",

doi = "10.1109/CLEOPR.2003.1277233",

language = "英语",

series = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "692",

booktitle = "CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics",

address = "美国",

}

Masuda, M, Sugioka, K, Cheng, Y, Kawachi, M, Shihotama, K, Toyoda, K & Midorikawa, K 2003, Fabrication of microfluidic structures three-dimensionally embedded in glass by femtosecond laser. in CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings., 1277233, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 692, 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003, Taipei, Taiwan, Province of China, 15/12/03. https://doi.org/10.1109/CLEOPR.2003.1277233

Fabrication of microfluidic structures three-dimensionally embedded in glass by femtosecond laser. / Masuda, Masashi; Sugioka, Koji; Cheng, Ya et al.
CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. p. 692 1277233 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Fabrication of microfluidic structures three-dimensionally embedded in glass by femtosecond laser

AU - Masuda, Masashi

AU - Sugioka, Koji

AU - Cheng, Ya

AU - Kawachi, Masako

AU - Shihotama, Kazuhiko

AU - Toyoda, Koichi

AU - Midorikawa, Katsumi

PY - 2003

Y1 - 2003

N2 - Fabrication of hollow three-dimensional (3-D) microstructures embedded in a photosensitive glass by a femtosecond laser is demonstrated. This technique is applied for manufacturing microfluidic structures composed of microcells, microchannels, and microvalves.

AB - Fabrication of hollow three-dimensional (3-D) microstructures embedded in a photosensitive glass by a femtosecond laser is demonstrated. This technique is applied for manufacturing microfluidic structures composed of microcells, microchannels, and microvalves.

UR - https://www.scopus.com/pages/publications/70349865781

U2 - 10.1109/CLEOPR.2003.1277233

DO - 10.1109/CLEOPR.2003.1277233

M3 - 会议稿件

AN - SCOPUS:70349865781

T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

SP - 692

BT - CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003

Y2 - 15 December 2003 through 19 December 2003

ER -

Masuda M, Sugioka K, Cheng Y, Kawachi M, Shihotama K, Toyoda K et al. Fabrication of microfluidic structures three-dimensionally embedded in glass by femtosecond laser. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2003. p. 692. 1277233. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). doi: 10.1109/CLEOPR.2003.1277233

Fabrication of microfluidic structures three-dimensionally embedded in glass by femtosecond laser

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