Abstract
Integrated optofluidic devices or microsystems are highly functional miniaturized devices composed of microfluidic and micro-optical components synergistically combined wiTheach other. They have found important applications in chemical sensing, biosensing, and reconfigurable photonics. This chapter describes the principles and techniques for fabricating microfluidic chips and integrated optofluidic devices in glass by femtosecond laser direct writing. It then gives a few examples of successful applications of fabricated devices. Major challenges and opportunities are also discussed.
| Original language | English |
|---|---|
| Title of host publication | Ultrafast Laser Processing |
| Subtitle of host publication | From Micro-to Nanoscale |
| Publisher | Pan Stanford Publishing Pte. Ltd. |
| Pages | 489-518 |
| Number of pages | 30 |
| ISBN (Electronic) | 9789814303699 |
| ISBN (Print) | 9789814267335 |
| State | Published - 1 Jan 2013 |
| Externally published | Yes |