Fabrication of IR reflectors by porous silicon technique

Zhejin Wang; Lianwei Wang; Yuxiang Zheng; Xiaoshuang Chen

doi:10.1109/ICSICT.2006.306645

Fabrication of IR reflectors by porous silicon technique

Zhejin Wang^*
, Lianwei Wang
, Yuxiang Zheng
, Xiaoshuang Chen

^*Corresponding author for this work

School of Physics and Electronic Science

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Omnidirectional mirrors worked in mid-infrared made by periodically repeating two different refractive index layers of fully and partially oxidized porous silicon have been reported. A reflector structural with good thermal isolation properties is proposed in this report. Oxidation properties of porous silicon multilayer structure have been investigated and the oxidization behavior as well as its microstructure has been investigated.

Original language	English
Title of host publication	ICSICT-2006
Subtitle of host publication	2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings
Publisher	IEEE Computer Society
Pages	1010-1012
Number of pages	3
ISBN (Print)	1424401615, 9781424401611
DOIs	https://doi.org/10.1109/ICSICT.2006.306645
State	Published - 2006
Event	ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology - Shanghai, China Duration: 23 Oct 2006 → 26 Oct 2006

Publication series

Name	ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings

Conference

Conference	ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology
Country/Territory	China
City	Shanghai
Period	23/10/06 → 26/10/06

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10.1109/ICSICT.2006.306645

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Wang, Z., Wang, L., Zheng, Y., & Chen, X. (2006). Fabrication of IR reflectors by porous silicon technique. In ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings (pp. 1010-1012). Article 4098306 (ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings). IEEE Computer Society. https://doi.org/10.1109/ICSICT.2006.306645

Wang, Zhejin ; Wang, Lianwei ; Zheng, Yuxiang et al. / Fabrication of IR reflectors by porous silicon technique. ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings. IEEE Computer Society, 2006. pp. 1010-1012 (ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings).

@inproceedings{1c3345d756134f0b913a36de957c0e68,

title = "Fabrication of IR reflectors by porous silicon technique",

abstract = "Omnidirectional mirrors worked in mid-infrared made by periodically repeating two different refractive index layers of fully and partially oxidized porous silicon have been reported. A reflector structural with good thermal isolation properties is proposed in this report. Oxidation properties of porous silicon multilayer structure have been investigated and the oxidization behavior as well as its microstructure has been investigated.",

author = "Zhejin Wang and Lianwei Wang and Yuxiang Zheng and Xiaoshuang Chen",

year = "2006",

doi = "10.1109/ICSICT.2006.306645",

language = "英语",

isbn = "1424401615",

series = "ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings",

publisher = "IEEE Computer Society",

pages = "1010--1012",

booktitle = "ICSICT-2006",

address = "美国",

note = "ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology ; Conference date: 23-10-2006 Through 26-10-2006",

}

Wang, Z, Wang, L, Zheng, Y & Chen, X 2006, Fabrication of IR reflectors by porous silicon technique. in ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings., 4098306, ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings, IEEE Computer Society, pp. 1010-1012, ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Shanghai, China, 23/10/06. https://doi.org/10.1109/ICSICT.2006.306645

Fabrication of IR reflectors by porous silicon technique. / Wang, Zhejin; Wang, Lianwei; Zheng, Yuxiang et al.
ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings. IEEE Computer Society, 2006. p. 1010-1012 4098306 (ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Fabrication of IR reflectors by porous silicon technique

AU - Wang, Zhejin

AU - Wang, Lianwei

AU - Zheng, Yuxiang

AU - Chen, Xiaoshuang

PY - 2006

Y1 - 2006

N2 - Omnidirectional mirrors worked in mid-infrared made by periodically repeating two different refractive index layers of fully and partially oxidized porous silicon have been reported. A reflector structural with good thermal isolation properties is proposed in this report. Oxidation properties of porous silicon multilayer structure have been investigated and the oxidization behavior as well as its microstructure has been investigated.

AB - Omnidirectional mirrors worked in mid-infrared made by periodically repeating two different refractive index layers of fully and partially oxidized porous silicon have been reported. A reflector structural with good thermal isolation properties is proposed in this report. Oxidation properties of porous silicon multilayer structure have been investigated and the oxidization behavior as well as its microstructure has been investigated.

UR - https://www.scopus.com/pages/publications/34547251546

U2 - 10.1109/ICSICT.2006.306645

DO - 10.1109/ICSICT.2006.306645

M3 - 会议稿件

AN - SCOPUS:34547251546

SN - 1424401615

SN - 9781424401611

T3 - ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings

SP - 1010

EP - 1012

BT - ICSICT-2006

PB - IEEE Computer Society

T2 - ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology

Y2 - 23 October 2006 through 26 October 2006

ER -

Wang Z, Wang L, Zheng Y, Chen X. Fabrication of IR reflectors by porous silicon technique. In ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings. IEEE Computer Society. 2006. p. 1010-1012. 4098306. (ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings). doi: 10.1109/ICSICT.2006.306645

Fabrication of IR reflectors by porous silicon technique

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