Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser

Zhiwei Fang; Ni Yao; Min Wang; Jintian Lin; Jianhao Zhang; Rongbo Wu; Lingling Qiao; Wei Fang; Tao Lu; Ya Cheng

doi:10.1080/15599612.2017.1406024

Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser

Zhiwei Fang
, Ni Yao
, Min Wang
, Jintian Lin
, Jianhao Zhang
, Rongbo Wu
, Lingling Qiao
, Wei Fang
, Tao Lu
, Ya Cheng^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

We demonstrate fabrication of a high-quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-µm diameter disks with a 200-nm gap are fabricated. With our device, an optical quality factor as high as 1.35 × 10⁵ is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.

Original language	English
Pages (from-to)	47-54
Number of pages	8
Journal	International Journal of Optomechatronics
Volume	11
Issue number	1
DOIs	https://doi.org/10.1080/15599612.2017.1406024
State	Published - 2 Jan 2017
Externally published	Yes

Keywords

Double disk
Integrated optics
Lithium niobate
Microfabrication
Microresonator

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10.1080/15599612.2017.1406024

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title = "Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser",

abstract = "We demonstrate fabrication of a high-quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-µm diameter disks with a 200-nm gap are fabricated. With our device, an optical quality factor as high as 1.35 × 105 is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.",

keywords = "Double disk, Integrated optics, Lithium niobate, Microfabrication, Microresonator",

author = "Zhiwei Fang and Ni Yao and Min Wang and Jintian Lin and Jianhao Zhang and Rongbo Wu and Lingling Qiao and Wei Fang and Tao Lu and Ya Cheng",

note = "Publisher Copyright: {\textcopyright} 2017 Zhiwei Fang, Ni Yao, Min Wang, Jintian Lin, Jianhao Zhang, Rongbo Wu, Lingling Qiao, Wei Fang, Tao Lu, and Ya Cheng.",

year = "2017",

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doi = "10.1080/15599612.2017.1406024",

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TY - JOUR

T1 - Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser

AU - Fang, Zhiwei

AU - Yao, Ni

AU - Wang, Min

AU - Lin, Jintian

AU - Zhang, Jianhao

AU - Wu, Rongbo

AU - Qiao, Lingling

AU - Fang, Wei

AU - Lu, Tao

AU - Cheng, Ya

PY - 2017/1/2

Y1 - 2017/1/2

N2 - We demonstrate fabrication of a high-quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-µm diameter disks with a 200-nm gap are fabricated. With our device, an optical quality factor as high as 1.35 × 105 is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.

AB - We demonstrate fabrication of a high-quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-µm diameter disks with a 200-nm gap are fabricated. With our device, an optical quality factor as high as 1.35 × 105 is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.

KW - Double disk

KW - Integrated optics

KW - Lithium niobate

KW - Microfabrication

KW - Microresonator

UR - https://www.scopus.com/pages/publications/85051665940

U2 - 10.1080/15599612.2017.1406024

DO - 10.1080/15599612.2017.1406024

M3 - 文章

AN - SCOPUS:85051665940

SN - 1559-9612

VL - 11

SP - 47

EP - 54

JO - International Journal of Optomechatronics

JF - International Journal of Optomechatronics

IS - 1

ER -

Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser

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Keywords

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