Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

Jintian Lin; Yingxin Xu; Zhiwei Fang; Min Wang; Jiangxin Song; Nengwen Wang; Lingling Qiao; Wei Fang; Ya Cheng

doi:10.1038/srep08072

Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

Jintian Lin
, Yingxin Xu
, Zhiwei Fang
, Min Wang
, Jiangxin Song
, Nengwen Wang
, Lingling Qiao
, Wei Fang
, Ya Cheng^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

226 Scopus citations

Abstract

We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ∼82 μm) LN resonator possesses a Q factor of ∼2.5 × 10⁵ around 1550nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.

Original language	English
Article number	8072
Journal	Scientific Reports
Volume	5
DOIs	https://doi.org/10.1038/srep08072
State	Published - 28 Jan 2015
Externally published	Yes

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title = "Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining",

abstract = "We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ∼82 μm) LN resonator possesses a Q factor of ∼2.5 × 105 around 1550nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.",

author = "Jintian Lin and Yingxin Xu and Zhiwei Fang and Min Wang and Jiangxin Song and Nengwen Wang and Lingling Qiao and Wei Fang and Ya Cheng",

year = "2015",

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doi = "10.1038/srep08072",

language = "英语",

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journal = "Scientific Reports",

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T1 - Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

AU - Lin, Jintian

AU - Xu, Yingxin

AU - Fang, Zhiwei

AU - Wang, Min

AU - Song, Jiangxin

AU - Wang, Nengwen

AU - Qiao, Lingling

AU - Fang, Wei

AU - Cheng, Ya

PY - 2015/1/28

Y1 - 2015/1/28

N2 - We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ∼82 μm) LN resonator possesses a Q factor of ∼2.5 × 105 around 1550nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.

AB - We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ∼82 μm) LN resonator possesses a Q factor of ∼2.5 × 105 around 1550nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.

UR - https://www.scopus.com/pages/publications/84939793016

U2 - 10.1038/srep08072

DO - 10.1038/srep08072

M3 - 文章

AN - SCOPUS:84939793016

SN - 2045-2322

VL - 5

JO - Scientific Reports

JF - Scientific Reports

M1 - 8072

ER -

Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

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