Fabrication of ferroelectric PbZrxTi1-xO3 thick films and their optical waveguide properties

G. J. Hu; S. H. Hu; X. J. Meng; G. S. Wang; Q. Zhao; J. L. Sun; J. H. Chu; N. Dai; L. Xu; L. Y. Liu; D. X. Li

doi:10.1116/1.1648677

Fabrication of ferroelectric PbZr_xTi_1-xO₃ thick films and their optical waveguide properties

G. J. Hu^*
, S. H. Hu
, X. J. Meng
, G. S. Wang
, Q. Zhao
, J. L. Sun
, J. H. Chu
, N. Dai
, L. Xu
, L. Y. Liu
, D. X. Li

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

The fabrication and characterization of the PbZr_xTi _1-xO₃ films with thickness of 3μm on LaNi₃ coated silicon substrates was carried out using sol-gel process. The x-ray diffraction analysis shows that both of the films exhibit highly (100) -preferred orientation and a single perovskite phase. More than 99% (100)- preferred orientation was achieved for the PZT film. Atomic foce microscopy measurement shows that the PZT samples possessed smooth surfaces and the low value of rms.

Original language	English
Pages (from-to)	422-424
Number of pages	3
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	22
Issue number	2
DOIs	https://doi.org/10.1116/1.1648677
State	Published - Mar 2004
Externally published	Yes

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@article{d5a765ee7ea245d9b2abd6273bcce029,

title = "Fabrication of ferroelectric PbZrxTi1-xO3 thick films and their optical waveguide properties",

abstract = "The fabrication and characterization of the PbZrxTi 1-xO3 films with thickness of 3μm on LaNi3 coated silicon substrates was carried out using sol-gel process. The x-ray diffraction analysis shows that both of the films exhibit highly (100) -preferred orientation and a single perovskite phase. More than 99\% (100)- preferred orientation was achieved for the PZT film. Atomic foce microscopy measurement shows that the PZT samples possessed smooth surfaces and the low value of rms.",

author = "Hu, \{G. J.\} and Hu, \{S. H.\} and Meng, \{X. J.\} and Wang, \{G. S.\} and Q. Zhao and Sun, \{J. L.\} and Chu, \{J. H.\} and N. Dai and L. Xu and Liu, \{L. Y.\} and Li, \{D. X.\}",

year = "2004",

month = mar,

doi = "10.1116/1.1648677",

language = "英语",

volume = "22",

pages = "422--424",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "2",

}

TY - JOUR

T1 - Fabrication of ferroelectric PbZrxTi1-xO3 thick films and their optical waveguide properties

AU - Hu, G. J.

AU - Hu, S. H.

AU - Meng, X. J.

AU - Wang, G. S.

AU - Zhao, Q.

AU - Sun, J. L.

AU - Chu, J. H.

AU - Dai, N.

AU - Xu, L.

AU - Liu, L. Y.

AU - Li, D. X.

PY - 2004/3

Y1 - 2004/3

N2 - The fabrication and characterization of the PbZrxTi 1-xO3 films with thickness of 3μm on LaNi3 coated silicon substrates was carried out using sol-gel process. The x-ray diffraction analysis shows that both of the films exhibit highly (100) -preferred orientation and a single perovskite phase. More than 99% (100)- preferred orientation was achieved for the PZT film. Atomic foce microscopy measurement shows that the PZT samples possessed smooth surfaces and the low value of rms.

AB - The fabrication and characterization of the PbZrxTi 1-xO3 films with thickness of 3μm on LaNi3 coated silicon substrates was carried out using sol-gel process. The x-ray diffraction analysis shows that both of the films exhibit highly (100) -preferred orientation and a single perovskite phase. More than 99% (100)- preferred orientation was achieved for the PZT film. Atomic foce microscopy measurement shows that the PZT samples possessed smooth surfaces and the low value of rms.

UR - https://www.scopus.com/pages/publications/12144289336

U2 - 10.1116/1.1648677

DO - 10.1116/1.1648677

M3 - 文章

AN - SCOPUS:12144289336

SN - 0734-2101

VL - 22

SP - 422

EP - 424

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 2

ER -

Fabrication of ferroelectric PbZr_xTi_1-xO₃ thick films and their optical waveguide properties

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