Fabrication of Cu(In, Ga)Se2 thin films by sputtering from a single quaternary chalcogenide target

  • J. H. Shi
  • , Z. Q. Li
  • , D. W. Zhang
  • , Q. Q. Liu
  • , Z. Z. Sun
  • , S. M. Huang

Research output: Contribution to journalArticlepeer-review

183 Scopus citations

Abstract

Single-layered Cu-In-Ga-Se precursors were fabricated by one-step sputtering of a single quaternary Cu(In,Ga)Se2 (CIGS) chalcogenide target at room temperature, followed by post selenization using Se vapor obtained from elemental Se pellets. The morphological and structural properties of both as-deposited and selenized films were characterized by X-ray diffraction (XRD), Raman spectroscope and scanning electron microscope (SEM). The precursor films exhibited a chalcopyrite structure with a preferential orientation in the (112) direction. The post-selenization process at high-temperature significantly improved the quality of the chalcopyrite CIGS. The CIGS layers after post-selenization were used to fabricate solar cells. The solar cell had an open-circuit voltage Voc of 0.422 V, a short-circuit current density J = 24.75 mA, a fill factor of 53.29%, and an efficiency of 7.95%.

Original languageEnglish
Pages (from-to)160-164
Number of pages5
JournalProgress in Photovoltaics: Research and Applications
Volume19
Issue number2
DOIs
StatePublished - Mar 2011

Keywords

  • Cu(In,Ga)Se
  • chalcopyrite
  • selenization
  • solar cell
  • sputtering
  • thin film

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