Fabrication of an integrated Raman sensor by selective surface metallization using a femtosecond laser oscillator

Zenghui Zhou; Jian Xu; Yang Liao; Ya Cheng; Zhizhan Xu; Koji Sugioka; Katsumi Midorikawa

doi:10.1016/j.optcom.2008.12.028

Fabrication of an integrated Raman sensor by selective surface metallization using a femtosecond laser oscillator

Zenghui Zhou, Jian Xu, Yang Liao, Ya Cheng, Zhizhan Xu, Koji Sugioka, Katsumi Midorikawa

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

We demonstrate that a Raman sensor integrated with a micro-heater, a microfluidic chamber, and a surface-enhanced Raman scattering (SERS) substrate can be fabricated in a glass chip by femtosecond laser micromachining. The micro-heater and the SERS substrate are fabricated by selective metallization on the glass surface using a femtosecond laser oscillator, whereas the microfluidic chamber embedded in the glass sample is fabricated by femtosecond laser ablation using a femtosecond laser amplifier. We believed that this new strategy for fabricating multifunctional integrated microchips has great potential application for lab-on-a-chips.

Original language	English
Pages (from-to)	1370-1373
Number of pages	4
Journal	Optics Communications
Volume	282
Issue number	7
DOIs	https://doi.org/10.1016/j.optcom.2008.12.028
State	Published - 1 Apr 2009
Externally published	Yes

Keywords

Femtosecond laser micromachining
Raman sensor
Surface metallization
Surface-enhanced Raman scattering

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10.1016/j.optcom.2008.12.028

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title = "Fabrication of an integrated Raman sensor by selective surface metallization using a femtosecond laser oscillator",

abstract = "We demonstrate that a Raman sensor integrated with a micro-heater, a microfluidic chamber, and a surface-enhanced Raman scattering (SERS) substrate can be fabricated in a glass chip by femtosecond laser micromachining. The micro-heater and the SERS substrate are fabricated by selective metallization on the glass surface using a femtosecond laser oscillator, whereas the microfluidic chamber embedded in the glass sample is fabricated by femtosecond laser ablation using a femtosecond laser amplifier. We believed that this new strategy for fabricating multifunctional integrated microchips has great potential application for lab-on-a-chips.",

keywords = "Femtosecond laser micromachining, Raman sensor, Surface metallization, Surface-enhanced Raman scattering",

author = "Zenghui Zhou and Jian Xu and Yang Liao and Ya Cheng and Zhizhan Xu and Koji Sugioka and Katsumi Midorikawa",

year = "2009",

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doi = "10.1016/j.optcom.2008.12.028",

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TY - JOUR

T1 - Fabrication of an integrated Raman sensor by selective surface metallization using a femtosecond laser oscillator

AU - Zhou, Zenghui

AU - Xu, Jian

AU - Liao, Yang

AU - Cheng, Ya

AU - Xu, Zhizhan

AU - Sugioka, Koji

AU - Midorikawa, Katsumi

PY - 2009/4/1

Y1 - 2009/4/1

N2 - We demonstrate that a Raman sensor integrated with a micro-heater, a microfluidic chamber, and a surface-enhanced Raman scattering (SERS) substrate can be fabricated in a glass chip by femtosecond laser micromachining. The micro-heater and the SERS substrate are fabricated by selective metallization on the glass surface using a femtosecond laser oscillator, whereas the microfluidic chamber embedded in the glass sample is fabricated by femtosecond laser ablation using a femtosecond laser amplifier. We believed that this new strategy for fabricating multifunctional integrated microchips has great potential application for lab-on-a-chips.

AB - We demonstrate that a Raman sensor integrated with a micro-heater, a microfluidic chamber, and a surface-enhanced Raman scattering (SERS) substrate can be fabricated in a glass chip by femtosecond laser micromachining. The micro-heater and the SERS substrate are fabricated by selective metallization on the glass surface using a femtosecond laser oscillator, whereas the microfluidic chamber embedded in the glass sample is fabricated by femtosecond laser ablation using a femtosecond laser amplifier. We believed that this new strategy for fabricating multifunctional integrated microchips has great potential application for lab-on-a-chips.

KW - Femtosecond laser micromachining

KW - Raman sensor

KW - Surface metallization

KW - Surface-enhanced Raman scattering

UR - https://www.scopus.com/pages/publications/59749103025

U2 - 10.1016/j.optcom.2008.12.028

DO - 10.1016/j.optcom.2008.12.028

M3 - 文章

AN - SCOPUS:59749103025

SN - 0030-4018

VL - 282

SP - 1370

EP - 1373

JO - Optics Communications

JF - Optics Communications

IS - 7

ER -

Fabrication of an integrated Raman sensor by selective surface metallization using a femtosecond laser oscillator

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Keywords

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