@inproceedings{92ac5b19c5354b27b1a51c0b48d23fab,
title = "Fabrication of a reflective mirror within wide incidence angles for mid-infrared wavelength",
abstract = "One-dimensional (1-D) photonic crystal with photonic band-gap based on porous silicon is fabricated with alternative etching currents during anodization. The microstructure was characterized by scanning electron microscopy and the optical reflectance spectra by Fourier transform infrared spectroscopy. A band-gap centered at 6 microns with a bandwidth of 3 microns has been successfully obtained. The prepared multilayer structure can reflect mid-infrared within a wide incidence angle up to 50°. After proper oxidation process, its thermal properties can be improved significantly, and meanwhile the band-gap only slightly shifts to that centered at 5.7 microns. PECVD of Si3N4 is employed to improve the surface morphology in order to make the structure suitable to the fabrication of sensors. It is found that deposition of Si3N4 does not change the reflectance properties of the structures.",
keywords = "Anodization, FTIR, Multilayer structure, Oxidation, PECVD of SiN, Wide angle",
author = "Miao Fengjuan and Zhang Jie and Xu Sliaohui and Wang Lianwei and Chu Junhao and Cao Zhishen and Zhan Peng and Wang Zhenlin",
year = "2008",
doi = "10.1109/META.2008.4723568",
language = "英语",
isbn = "9781424426089",
series = "META08 - Proceedings of the 2008 International Workshop on Metamaterials",
pages = "173--176",
booktitle = "META08 - Proceedings of the 2008 International Workshop on Metamaterials",
note = "2008 International Workshop on Metamaterials, META08 ; Conference date: 09-11-2008 Through 12-11-2008",
}