Fabrication of 3D microreactor structures embedded in photosensitive glass by femtosecond laser

Masashi Masuda; Koji Sugioka; Ya Cheng; Masako Kawachi; Kazuhiko Shihoyama; Koichi Toyoda; Katsumi Midorikawa

doi:10.1117/12.541066

Fabrication of 3D microreactor structures embedded in photosensitive glass by femtosecond laser

Masashi Masuda^*
, Koji Sugioka
, Ya Cheng
, Masako Kawachi
, Kazuhiko Shihoyama
, Koichi Toyoda
, Katsumi Midorikawa

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

We show that femtosecond laser enables us to produce true three-dimensional (3-D) microstructures embedded in a photosensitive glass, which has superior properties on transparency, hardness, chemical and thermal resistances. After exposure of the focused laser beam, the latent images are written. Modified regions are developed by a post baking process and then preferentially etched away in dilute solution of hydrofluoric (HF) acid solution in an ultrasonic bath at room temperature. The contrast ratio in etching selectivity is examined for different concentration of HF solution. Based on this result, a freely movable microplate which has a function of micro valve in the microreactor is fabricated inside the glass.

Original language	English
Pages (from-to)	98-102
Number of pages	5
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5063
DOIs	https://doi.org/10.1117/12.541066
State	Published - 2003
Externally published	Yes
Event	Fourth International Symposium on Laser Precision Microfabrication - Munich, Germany Duration: 21 Jun 2003 → 24 Jun 2003

Keywords

Femtosecond laser
Microreactor
Photosensitive glass
μ-TAS

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10.1117/12.541066

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title = "Fabrication of 3D microreactor structures embedded in photosensitive glass by femtosecond laser",

abstract = "We show that femtosecond laser enables us to produce true three-dimensional (3-D) microstructures embedded in a photosensitive glass, which has superior properties on transparency, hardness, chemical and thermal resistances. After exposure of the focused laser beam, the latent images are written. Modified regions are developed by a post baking process and then preferentially etched away in dilute solution of hydrofluoric (HF) acid solution in an ultrasonic bath at room temperature. The contrast ratio in etching selectivity is examined for different concentration of HF solution. Based on this result, a freely movable microplate which has a function of micro valve in the microreactor is fabricated inside the glass.",

keywords = "Femtosecond laser, Microreactor, Photosensitive glass, μ-TAS",

author = "Masashi Masuda and Koji Sugioka and Ya Cheng and Masako Kawachi and Kazuhiko Shihoyama and Koichi Toyoda and Katsumi Midorikawa",

year = "2003",

doi = "10.1117/12.541066",

language = "英语",

volume = "5063",

pages = "98--102",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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publisher = "SPIE",

note = "Fourth International Symposium on Laser Precision Microfabrication ; Conference date: 21-06-2003 Through 24-06-2003",

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TY - JOUR

T1 - Fabrication of 3D microreactor structures embedded in photosensitive glass by femtosecond laser

AU - Masuda, Masashi

AU - Sugioka, Koji

AU - Cheng, Ya

AU - Kawachi, Masako

AU - Shihoyama, Kazuhiko

AU - Toyoda, Koichi

AU - Midorikawa, Katsumi

PY - 2003

Y1 - 2003

N2 - We show that femtosecond laser enables us to produce true three-dimensional (3-D) microstructures embedded in a photosensitive glass, which has superior properties on transparency, hardness, chemical and thermal resistances. After exposure of the focused laser beam, the latent images are written. Modified regions are developed by a post baking process and then preferentially etched away in dilute solution of hydrofluoric (HF) acid solution in an ultrasonic bath at room temperature. The contrast ratio in etching selectivity is examined for different concentration of HF solution. Based on this result, a freely movable microplate which has a function of micro valve in the microreactor is fabricated inside the glass.

AB - We show that femtosecond laser enables us to produce true three-dimensional (3-D) microstructures embedded in a photosensitive glass, which has superior properties on transparency, hardness, chemical and thermal resistances. After exposure of the focused laser beam, the latent images are written. Modified regions are developed by a post baking process and then preferentially etched away in dilute solution of hydrofluoric (HF) acid solution in an ultrasonic bath at room temperature. The contrast ratio in etching selectivity is examined for different concentration of HF solution. Based on this result, a freely movable microplate which has a function of micro valve in the microreactor is fabricated inside the glass.

KW - Femtosecond laser

KW - Microreactor

KW - Photosensitive glass

KW - μ-TAS

UR - https://www.scopus.com/pages/publications/2342461707

U2 - 10.1117/12.541066

DO - 10.1117/12.541066

M3 - 会议文章

AN - SCOPUS:2342461707

SN - 0277-786X

VL - 5063

SP - 98

EP - 102

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Fourth International Symposium on Laser Precision Microfabrication

Y2 - 21 June 2003 through 24 June 2003

ER -

Fabrication of 3D microreactor structures embedded in photosensitive glass by femtosecond laser

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Keywords

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